Abstract
This paper presents a Built-In-Self-Test (BIST) implementation of pseudo-random testing for MEMS. The technique is based on Impulse Response (IR) evaluation using pseudo-random Maximum–Length Sequences (MLS). The MLS approach is capable of providing vastly superior dynamic range in comparison to the straightforward technique using an impulse excitation and is thus an optimal solution for measurements in noisy environments and for low-power test signals. The use of a pseudo-random sequence makes the practical on-chip implementation very efficient in terms of the extra hardware required for on-chip testing. We will demonstrate the use of this technique for an on-chip fast and accurate broadband determination of MEMS behaviour, in particular for the characterisation of cantilever MEMS structures, determining their mechanical and thermal behaviour using just electrical tests.
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Libor Rufer has received Engineering and PhD degrees from the Czech Technical University, Prague, Czech Republic. Until 1993 he was with the Faculty of Electrical Engineering of the Czech Technical University, Prague and since 1994, he is Associate Professor at the Joseph Fourier University, Grenoble, France. In 1998, he joined the Microsystems research team of the TIMA Laboratory. Currently he is a member of the Reliable Mixed-signal Systems Group of the same Laboratory. His expertise and research interests pertain MEMS-based sensors and actuators, electro-acoustic and electro-mechanical transducers, their modelling, applications, associated measurement techniques, and analogue and mixed-signal system test.
Salvador Mir has an Industrial Engineering (Electrical, 1987) degree from the Polytechnic University of Catalonia, Barcelona, Spain, and M.Sc. (1989) and Ph.D. (1993) degrees in Computer Science from the University of Manchester, UK. He is a researcher of Centre National de la Recherche Scientifique, France, and he is leading the RMS (Reliable Mixed-signal Systems) Group at TIMA Laboratory in Grenoble, France. He is the author of many research papers and editor of two books on silicon microsystems. His research interests include analogue, mixed-signal, RF and microsystem design and test, and applications of Artificial Intelligence to Computer-Aided Design.
Emmanuel Simeu received Electrical Engineering degree, DEA and Ph.D. in Automatic Control from National Polytechnic Institute of Grenoble in 1987, 1988 and 1992, respectively. He is Associate Professor of Automatic Control and Electrical engineering in Joseph Fourier University of Grenoble. He is also a researcher in the RMS Group at TIMA Laboratory. His research interests include system modelling, reliability of integrated systems, online testing of analogue, digital and mixed signal systems.
Christian Domingues was born in Lyon, France, in 1978. He received a Master degree in Microelectronics from the Institut National Polytechnique de Grenoble, France, in 2001. He is currently pursuing a Ph.D. degree at TIMA Laboratory in Grenoble, France. His research interests include mixed-signal integrated circuit design, and micromachined sensors and actuators.
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Rufer, L., Mir, S., Simeu, E. et al. On-Chip Pseudorandom MEMS Testing. J Electron Test 21, 233–241 (2005). https://doi.org/10.1007/s10836-005-6353-9
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DOI: https://doi.org/10.1007/s10836-005-6353-9