Abstract
This paper presents the controller design of an XY parallel micropositioning stage aiming at a sub-micron accuracy for micro scale manipulation. Owning to the decoupled design of the mechanism, a simple single-input-single-output (SISO) PID controller is adopted for each axis. To compensate for the hysteresis arising from piezoelectric actuator, credit assigned CMAC (cerebellar model articulation controller) neural network with adjustable learning rate is employed into the PID control. Experimental results show that the hysteresis of the stage has been significantly reduced by the CMAC-based PID controller and the stage can achieve a sub-micron positioning accuracy, which demonstrate the effectiveness of the designed controller as well.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Du, E., Cui, H., Zhu, Z.: Review of nanomanipulators for nanomanufacturing. Int. J. Nanomanufacturing 1, 83–104 (2006)
Pham, H.H., Chen, I.M.: Evaluation of resolution of flexure parallel mechanisms for ultraprecision manipulation. Rev. Sci. Instrum. 75, 3016–3024 (2004)
Choi, K.B., Kim, D.H.: Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion. Rev. Sci. Instrum. 77, 65–106 (2006)
Li, Y., Xu, Q.: A novel design and analysis of a 2-DOF compliant parallel micromanipulator for nanomanipulation. IEEE Trans. Automat. Sci. Eng. 3, 248–254 (2006)
Yao, Q., Dong, J., Ferreira, P.: Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. Int. J. Mach. Tools Manuf. 47, 946–961 (2007)
Awtar, S., Slocum, A.H.: Constraint-based design of parallel kinematic XY flexure mechanisms. ASME J. Mech. Des. 129, 816–830 (2007)
Yong, Y.K., Aphale, S.S., Moheimani, S.O.R.: Design, analysis and control of a fast nanopositioning stage. In: Proc. of IEEE Int. Conf. on Advanced Intelligent Mechatronics, pp. 451–456 (2008)
Li, Y., Xu, Q.: Design of a new decoupled XY flexure parallel kinematic manipulator with actuator isolation. In: Proc. of IEEE Int. Conf. on Intelligent Robots and Systems, pp. 470–475 (2008)
Song, G., Zhao, J., Zhou, X., De Abreu-Garcia, J.: Tracking control of a piezoceramic actuator with hysteresis compensation using inverse preisach model. IEEE/ASME Trans. Mechatron. 10, 198–209 (2005)
Aphale, S.S., Devasia, S., Moheimani, S.O.R.: High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties. Nanotechnology 19, 125–503 (2008)
Leang, K.K., Devasia, S.: Hysteresis, creep, and vibration compensation for piezoactuators: Feedback and feedforward control. In: Proc. of 2nd IFAC Conf. on Mechatronic Systems, pp. 283–289 (2002)
Liaw, H.C., Shirinzadeh, B., Smith, J.: Robust motion tracking control of piezo-driven flexure-based four-bar mechanism for micro/nano manipulation. Mechatronics 18, 111–120 (2008)
Zhang, L., Cao, Q., Lee, J., Zhao, Y.: A modified CMAC algorithm based on credit assignment. Neural Processing Letters 20, 1–10 (2004)
Lu, H.C., Chang, J.C., Yeh, M.F.: Design and analysis of direct-action CMAC PID controller. Neurocomputing 70, 2615–2625 (2007)
Ku, S.S., Pinsopon, U., Cetinkunt, S., ichi Nakajima, S.: Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner. IEEE/ASME Trans. Mechatron 5, 273–280 (2000)
Su, S.F., Tao, T., Hung, T.H.: Credit assigned CMAC and its application to online learning robust controllers. IEEE Trans. Syst. 33, 202–213 (2003)
Li, Y., Leong, S.H.: Kinematics control of redundant manipulators using a CMAC neural network combined with a genetic algorithm. Robotica 22, 611–621 (2004)
Wang, J., Zhang, C., Jing, Y.: Hybrid CMAC-PID controller in heating ventilating and air-conditioning system. In: Proc. of IEEE Int. Conf. on Mechatronics and Automation, pp. 3706–3711 (2007)
Lin, C.S., Chiang, C.T.: Learning convergence of CMAC technique. IEEE Trans. Neural Networks 8, 1281–1292 (1997)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Xu, Q., Li, Y. (2009). CMAC-Based PID Control of an XY Parallel Micropositioning Stage. In: Yu, W., He, H., Zhang, N. (eds) Advances in Neural Networks – ISNN 2009. ISNN 2009. Lecture Notes in Computer Science, vol 5552. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-01510-6_118
Download citation
DOI: https://doi.org/10.1007/978-3-642-01510-6_118
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-01509-0
Online ISBN: 978-3-642-01510-6
eBook Packages: Computer ScienceComputer Science (R0)