Browser Not SupportedCorrection to “Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications” [Apr 18 3576-3584] | IEEE Journals & Magazine | IEEE Xplore

Notice: IEEE Xplore is unable to display this page because you may be using an incompatible or unsupported browser.

For the best experience, please upgrade to a newer, supported browser using the links below. If you cannot upgrade your browser, a temporary IEEE Xplore site is available for basic searches with links to full-text.