Abstract
Low-loss high-performance systems with smaller footprints are highly regarded in the area of radio-frequency (RF) applications. In this paper, a multi-port single-pole six-throw (SP6T) based on RF MEMS ohmic switches design is proposed. The complete switch is designed with very small footprints of 1.2 mm\(^2\). Six ohmic/series microelectromechanical (MEMS) switches are designed to get high-isolation in microwave frequency range. The spring constant and actuation voltage required for the operation of the switches is computed using stress analysis module of finite element modeler. The robustness issue of RF MEMS switches can be increased by the proposed geometry. Based on the calculations and simulations, it can be seen that the switches can easily withstand the stress of \(\approx\)120 MPa. The simulated RF performance of SP6T switch exhibits isolation of 70–45 dB and insertion loss of 0.01 dB for DC to 6 GHz between input port and individual output port. The proposed SP6T switch require low operational voltage level of 12.5 V.















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Aimi MF, Rao MP, MacDonald NC, Zuruhi AS, Bothman DP (2004) High-aspect-ratio bulk micromachining of titanium. Nat Mater (Letters) 3:103–105
Ding C, Huang X, Gregori G, Parker ER, Rao MP, Clarke DR, MacDonald NC (2005) Development of bulk-titanium-based RF MEMS switch for harsh environment applications. In: Proceedings of the 2005 ASME international mechanical engineering congress and exposition, Orlando, pp 1–4
Goldsmith CL, Lin T, Powers B, Wu W, Norvell B (1995) Micromechanical membrane switches for microwave applications. In: 1995 IEEE international MTT-S symposium digest, vol 1, pp 91–94
Hyman D, Mehregany M (1999) Contact physics of gold microcontacts for MEMS switches. IEEE Trans Compon Packag Technol 22(3):357–364
Jaafar H, Beh K, Yunus N, Hasan W, Shafie S, Sidek O (2014) A comprehensive study on RF MEMS switch. Microsyst Technol 20(12):2109–2121
Kang S, Kim H, Chun K (2009) A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb drive. J Micromech Microeng 19(3):035011
Kennedy J (2001) Surface mount components reduce broadband equipment costs. Appl Microwav Wirel 13(1):102–108
Lee J, Je CH, Kang S, Choi CA (2005) A low-loss single-pole six-throw switch based on compact RF MEMS switches. IEEE Trans Microwav Theory Tech 53(11):3335–3344
Lee SD, Jun BC, Kim SD, Park HC, Rhee JK, Mizuno K (2006) An RF-MEMS switch with low-actuation voltage and high reliability. J Microelectromech Syst 15(6):1605–1611
Lishchunska M, Cordero N, Slattery O, O’Mahony C (2006) Spring constant models for analysis and design of MEMS plates on straight or meander tethers. Sens Lett 4(2):200–205
Lucibello A, Proietti E, Giacomozzi F, Marcelli R, Bartolucci G, De Angelis G (2013) RF MEMS switches fabrication by using SU-8 technology. Microsyst Technol 19(6):929–936
Muldavin JB, Rebeiz GM (2000) High-isolation CPW MEMS shunt switches: part 1: modeling. IEEE Trans Microwav Theory Tech 48(6):1045–1052
Muniraj N, Sathesh K (2011) Design of MEMS switch for RF applications. Microsyst Technol 17(1):161–163
O’Mahony C, Hill M, Hugher PJ, Lane WA (2002) Titanium as a micromechanical material. J Micromech Microeng 12(4):438–443
Pacheco S, Nguyen CT, Katehi LP (1998) Micromechanical electrostatic k-band switches. In: Proceedings of the IEEE MTT-S international microwave symposium digest, vol 3. Baltimore, pp 1569–1572
Palego C, Deng J, Peng Z, Halder S, Hwang JC, Forehand DI, Scarbrough D, Goldsmith CL, Johnston I, Sampath SK et al (2009) Robustness of RF MEMS capacitive switches with molybdenum membranes. IEEE Trans Microwav Theory Tech 57(12):3262–3269
Peroulis D, Pacheco S, Sarabandi K, Katehi LP (2003) Electromechanical consideration in developing low-voltage RF MEMS switches. IEEE Trans Microwav Theory Tech 51(1):259–270
Peroulis D, Pacheco S, Sarabandi K, Katehi P (2000) MEMS devices for high isolation switching and tunable filtering. In: Proceedings of the IEEE MTT-S international microwave symposium digest, vol 2. Boston, pp 1217–1220
Pirmoradi E, Mirzajani H, Ghavifekr HB (2014) Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications. Microsyst Technol, pp 1–11
Rebeiz GM, Muldavin JB (2001) RF MEMS switches and switch circuits. IEEE Microwav Mag 2(4):59–71
Rebeiz GM (2003) RF MEMS: theory, design, and technology, 1st edn. Wiley-Interscience, New York
Rizk JB, Rebeiz GM (2003) W-band CPW RF MEMS circuits on quartz substrates. IEEE Trans Microwav Theory Tech 51(7):1857–1862
Sharma AK, Gupta N (2013) Electromagnetic modeling and parameter extraction of RF-MEMS switch. Microsyst Technol, pp 1–5
Sharma AK, Gupta N (2014) Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch. Microsyst Technol 20(3):413–418
Sharpe Jr WN, Yuan B, Vaidyanathan R, Edwards RL (1997) Measurements of young’s modulus, poisson’s ratio, and tensile strength of polysilicon. In: Proceedings of the IEEE 10th annual international workshop on MEMS. Naguya, pp 424–429
Shen SC, Caruth D, Feng M (2000) Broadband low actuation voltage RF MEMS switches. In: 22nd annual GaAs IC symposium. Seatle, pp 161–164
Singh T (2014) Design and finite element modeling of series-shunt configuration based RF MEMS switch for high isolation operation in K-Ka band. J Comput Electr,pp 1–13
Singh T (2013) Effective stress modeling of membranes made of gold and aluminum materials used in radio-frequency microelectromechanical system switches. Trans Electr Electr Mater 14(4):172–176
Singh T (2013) From theory to development: role of multiphysics modeling and its effect on education in electronics. Electronics 17(2):105–109
Singh T, Khaira N (2014) High isolation single-pole four-throw RF MEMS switch based on series-shunt configuration. Sci World J 2014(605894):1–7
Singh T, Pashaie F (2014) Circuit modelling and eigenfrequency analysis of a poly-Si based RF MEMS switch designed and modelled for IEEE 802.11 AD protocol. J Comput Sci Eng 8(3):129–136
Singh T, Pashaie F (2014) Finite element modeling of a Ti based compact RF MEMS series switch design for harsh environment. Microsyst Technol (in press)
Yao ZJ, Chen S, Eshelman S, Denniston D, Goldsmith CL (1999) Micromachined low-loss microwave switches. IEEE J Microelectromech Syst 8(2):129–134
Zareie H, Rebeiz GM (2014) Compact high-power SPST and SP4T RF MEMS metal-contact switches. IEEE Trans Microwav Theory Tech 62(2):297–305
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Singh, T., Rangra, K.J. Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz. Microsyst Technol 21, 2387–2396 (2015). https://doi.org/10.1007/s00542-015-2411-0
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DOI: https://doi.org/10.1007/s00542-015-2411-0