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Matthias Wagner 0006

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affiliation: PVA Metrology & Plasma Solutions GmbH, Jena-Maua, Germany

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2016
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Martin Herms, Matthias Wagner, Ingrid De Wolf:
Copper Through Silicon Vias Studied by Photo-elastic Scanning Infrared Microscopy. Microelectron. Reliab. 64: 330-335 (2016)

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