{"id":"https://openalex.org/W2751944553","doi":"https://doi.org/10.1109/nems.2017.8017021","title":"A study on young's modulus of electroplated gold cantilevers for MEMS devices","display_name":"A study on young's modulus of electroplated gold cantilevers for MEMS devices","publication_year":2017,"publication_date":"2017-04-01","ids":{"openalex":"https://openalex.org/W2751944553","doi":"https://doi.org/10.1109/nems.2017.8017021","mag":"2751944553"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017021","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5059074871","display_name":"H. Nakajima","orcid":"https://orcid.org/0000-0002-2742-1230"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"funder","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hideaki Nakajima","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020408019","display_name":"Tso\u2010Fu Mark Chang","orcid":"https://orcid.org/0000-0003-0221-8882"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"funder","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tso-Fu Mark Chang","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101968631","display_name":"Chun\u2010Yi Chen","orcid":"https://orcid.org/0000-0002-1344-4271"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"funder","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Chun-Yi Chen","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110320515","display_name":"Toshifumi Konishi","orcid":null},"institutions":[],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshifumi Konishi","raw_affiliation_strings":["NTT Advanced Technology Cooperation Atsugi, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"NTT Advanced Technology Cooperation Atsugi, Kanagawa, Japan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080095206","display_name":"Katsuyuki Machida","orcid":"https://orcid.org/0000-0002-9706-3475"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"funder","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Katsuyuki Machida","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","NTT Advanced Technology Cooperation Atsugi, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"NTT Advanced Technology Cooperation Atsugi, Kanagawa, Japan","institution_ids":[]},{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004166791","display_name":"Hiroshi Toshiyoshi","orcid":"https://orcid.org/0000-0003-3678-7741"},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"funder","lineage":["https://openalex.org/I74801974"]},{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroshi Toshiyoshi","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","The University of Tokyo, Tokyo, Japan"],"affiliations":[{"raw_affiliation_string":"The University of Tokyo, Tokyo, Japan","institution_ids":["https://openalex.org/I74801974"]},{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075309178","display_name":"Daisuke Yamane","orcid":"https://orcid.org/0000-0002-9262-4704"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"funder","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Daisuke Yamane","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049015548","display_name":"Kazuya Masu","orcid":"https://orcid.org/0000-0002-7121-8440"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"funder","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuya Masu","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062195183","display_name":"Masato Sone","orcid":"https://orcid.org/0000-0002-7334-1952"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I114531698","display_name":"Tokyo Institute of Technology","ror":"https://ror.org/0112mx960","country_code":"JP","type":"funder","lineage":["https://openalex.org/I114531698"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masato Sone","raw_affiliation_strings":["CREST, Japan Science and Technology Agency, Yokohama, Japan","Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan"],"affiliations":[{"raw_affiliation_string":"CREST, Japan Science and Technology Agency, Yokohama, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, Japan","institution_ids":["https://openalex.org/I114531698"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.608,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":4,"citation_normalized_percentile":{"value":0.558288,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":77,"max":79},"biblio":{"volume":null,"issue":null,"first_page":"264","last_page":"267"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9975,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.91779053},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9008797},{"id":"https://openalex.org/C51807945","wikidata":"https://www.wikidata.org/wiki/Q3503392","display_name":"Electroplating","level":3,"score":0.8747525},{"id":"https://openalex.org/C193867417","wikidata":"https://www.wikidata.org/wiki/Q6889814","display_name":"Modulus","level":2,"score":0.75392926},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7298223},{"id":"https://openalex.org/C196029304","wikidata":"https://www.wikidata.org/wiki/Q2091584","display_name":"Young's modulus","level":2,"score":0.60077614},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.43120873},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4110813},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3356111},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.33408707},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.32807016},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.12074089},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07493329},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/nems.2017.8017021","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[],"grants":[],"datasets":[],"versions":[],"referenced_works_count":11,"referenced_works":["https://openalex.org/W1988693676","https://openalex.org/W1989511389","https://openalex.org/W1991004252","https://openalex.org/W1995523270","https://openalex.org/W2020269820","https://openalex.org/W2027748950","https://openalex.org/W2040332050","https://openalex.org/W2041298953","https://openalex.org/W2051408335","https://openalex.org/W2249759886","https://openalex.org/W2290759514"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2915680872","https://openalex.org/W2760996480","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2303727101","https://openalex.org/W2107125189","https://openalex.org/W2048171849","https://openalex.org/W2026330382","https://openalex.org/W1998637294"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"evaluation":[3],"of":[4,9,17],"the":[5,18,55,58,65,71,78,86],"effective":[6],"Young's":[7,13,66,79],"modulus":[8,14,67,80],"electroplated":[10,28],"gold":[11],"micro-cantilevers.":[12],"is":[15],"one":[16],"fundamental":[19],"parameters":[20],"to":[21,34,92],"design":[22,93],"MEMS":[23,29,37,94],"(microelectromechanical":[24],"systems)":[25],"components.":[26],"Gold":[27],"structures":[30],"can":[31],"be":[32,90],"used":[33],"develop":[35],"highly-sensitive":[36],"sensors,":[38],"such":[39],"as":[40],"accelerometers.":[41],"With":[42],"a":[43],"resonant":[44],"frequency":[45],"method,":[46],"we":[47],"evaluate":[48],"gold-electroplated":[49],"Ti/Au":[50],"cantilevers":[51],"by":[52],"varying":[53],"both":[54],"length":[56],"and":[57,73],"width.":[59],"The":[60],"experimental":[61],"results":[62],"showed":[63],"that":[64,77],"was":[68,75],"dependent":[69],"on":[70],"width,":[72,87],"it":[74],"found":[76],"increased":[81],"with":[82],"an":[83],"increase":[84],"in":[85],"which":[88],"would":[89],"useful":[91],"devices.":[95]},"abstract_inverted_index_v3":null,"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2751944553","counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2025-03-15T22:53:09.396626","created_date":"2017-09-15"}