{"id":"https://openalex.org/W2311869522","doi":"https://doi.org/10.1109/icsenst.2015.7438464","title":"Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement","display_name":"Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement","publication_year":2015,"publication_date":"2015-12-01","ids":{"openalex":"https://openalex.org/W2311869522","doi":"https://doi.org/10.1109/icsenst.2015.7438464","mag":"2311869522"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsenst.2015.7438464","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021525658","display_name":"Roumen Nojdelov","orcid":null},"institutions":[],"countries":["BG"],"is_corresponding":false,"raw_author_name":"Roumen Nojdelov","raw_affiliation_strings":["Arsen Development Ltd Sofia, Bulgaria"],"affiliations":[{"raw_affiliation_string":"Arsen Development Ltd Sofia, Bulgaria","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109258696","display_name":"Dirk Voigt","orcid":null},"institutions":[{"id":"https://openalex.org/I4210164637","display_name":"VSL Dutch Metrology Institute","ror":"https://ror.org/05ap1vt50","country_code":"NL","type":"facility","lineage":["https://openalex.org/I4210164637"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Dirk Voigt","raw_affiliation_strings":["VSL Delft, The Netherlands"],"affiliations":[{"raw_affiliation_string":"VSL Delft, The Netherlands","institution_ids":["https://openalex.org/I4210164637"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050127073","display_name":"Arthur S. van de Nes","orcid":null},"institutions":[{"id":"https://openalex.org/I4210164637","display_name":"VSL Dutch Metrology Institute","ror":"https://ror.org/05ap1vt50","country_code":"NL","type":"facility","lineage":["https://openalex.org/I4210164637"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Arthur S. van de Nes","raw_affiliation_strings":["VSL Delft, The Netherlands"],"affiliations":[{"raw_affiliation_string":"VSL Delft, The Netherlands","institution_ids":["https://openalex.org/I4210164637"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085724634","display_name":"Stoyan Nihtianov","orcid":"https://orcid.org/0000-0001-9937-8510"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Stoyan Nihtianov","raw_affiliation_strings":["Microelectronics Dept., EEMCS Delft University of Technology Delft, The Netherlands"],"affiliations":[{"raw_affiliation_string":"Microelectronics Dept., EEMCS Delft University of Technology Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]}],"institution_assertions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":1,"citation_normalized_percentile":{"value":0.371952,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":66,"max":73},"biblio":{"volume":"50","issue":null,"first_page":"575","last_page":"580"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9985,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9982,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.56720585}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8430151},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.7039409},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.6452559},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.6157171},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.56720585},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.5366252},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.42891163},{"id":"https://openalex.org/C19619285","wikidata":"https://www.wikidata.org/wiki/Q196372","display_name":"Observational error","level":2,"score":0.4238304},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38558137},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.37057236},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.359551},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.32894403},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22585303},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.197986},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.07793552},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsenst.2015.7438464","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.62}],"grants":[],"datasets":[],"versions":[],"referenced_works_count":10,"referenced_works":["https://openalex.org/W1968134562","https://openalex.org/W1972360726","https://openalex.org/W2019037029","https://openalex.org/W2037702163","https://openalex.org/W2093534148","https://openalex.org/W2116187174","https://openalex.org/W2139763674","https://openalex.org/W2141966428","https://openalex.org/W2148141107","https://openalex.org/W2329210660"],"related_works":["https://openalex.org/W4400063720","https://openalex.org/W4365794569","https://openalex.org/W4247324130","https://openalex.org/W3172386668","https://openalex.org/W3102847316","https://openalex.org/W2354821598","https://openalex.org/W2347456755","https://openalex.org/W2291633415","https://openalex.org/W2023858428","https://openalex.org/W1988809445"],"abstract_inverted_index":{"In":[0],"this":[1],"paper":[2],"we":[3],"present":[4],"an":[5,44],"investigation":[6],"of":[7,21,34,55,77,87],"the":[8,52,56,73],"main":[9],"non-idealities":[10],"and":[11,26,70],"error":[12],"sources":[13,20],"in":[14],"precision":[15],"capacitive":[16,36],"displacement":[17,47,85],"sensors.":[18],"The":[19,32],"errors":[22],"are":[23,68],"described":[24],"quantitatively":[25],"a":[27,35],"compensation":[28,57],"technique":[29],"is":[30,41,58,82],"proposed.":[31],"linearity":[33],"sensor":[37],"with":[38,43,72],"self-alignment":[39],"feature":[40],"tested":[42],"optical":[45],"Fabry-Perot":[46],"Interferometer.":[48],"Experimental":[49],"data":[50],"from":[51],"practical":[53],"implementation":[54],"presented.":[59],"Two":[60],"different":[61],"models":[62],"for":[63,84],"guard":[64],"ring":[65],"gap":[66],"correction":[67],"compared":[69],"verified":[71],"experimental":[74],"data.":[75],"Accuracy":[76],"better":[78],"than":[79],"2":[80],"nm":[81],"achieved":[83],"range":[86],"15":[88],"\u03bcm,":[89],"using":[90],"only":[91],"two":[92],"calibration":[93],"points.":[94]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2311869522","counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2025-01-16T08:52:39.706698","created_date":"2016-06-24"}