{"id":"https://openalex.org/W1994289509","doi":"https://doi.org/10.1109/icra.2012.6225230","title":"Automated nanomanipulation for nano device construction","display_name":"Automated nanomanipulation for nano device construction","publication_year":2012,"publication_date":"2012-05-01","ids":{"openalex":"https://openalex.org/W1994289509","doi":"https://doi.org/10.1109/icra.2012.6225230","mag":"1994289509"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/icra.2012.6225230","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019116922","display_name":"Yan Liang Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Yan Liang Zhang","raw_affiliation_strings":["Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada"],"affiliations":[{"raw_affiliation_string":"Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100762970","display_name":"Jason Li","orcid":"https://orcid.org/0000-0002-1150-3549"},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Jason Li","raw_affiliation_strings":["Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada"],"affiliations":[{"raw_affiliation_string":"Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059145225","display_name":"Steve To","orcid":null},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Steve To","raw_affiliation_strings":["Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada"],"affiliations":[{"raw_affiliation_string":"Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100419819","display_name":"Yong Zhang","orcid":"https://orcid.org/0000-0002-7625-2234"},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Yong Zhang","raw_affiliation_strings":["Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada"],"affiliations":[{"raw_affiliation_string":"Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083505708","display_name":"Xutao Ye","orcid":null},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"None Xutao Ye","raw_affiliation_strings":["Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada"],"affiliations":[{"raw_affiliation_string":"Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077878309","display_name":"Yu Sun","orcid":"https://orcid.org/0000-0001-7895-0741"},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Yu Sun","raw_affiliation_strings":["Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada"],"affiliations":[{"raw_affiliation_string":"Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, ON M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.462,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":1,"citation_normalized_percentile":{"value":0.342406,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":64,"max":72},"biblio":{"volume":null,"issue":null,"first_page":"1063","last_page":"1068"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9999,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9999,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9984,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanoelectronics","display_name":"Nanoelectronics","score":0.42136604}],"concepts":[{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.86171836},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7138843},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.7043097},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.6692504},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.64609677},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.64376116},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6158801},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.54297453},{"id":"https://openalex.org/C174348530","wikidata":"https://www.wikidata.org/wiki/Q188635","display_name":"Bridging (networking)","level":2,"score":0.45001665},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.43534842},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.42322987},{"id":"https://openalex.org/C141400236","wikidata":"https://www.wikidata.org/wiki/Q1479544","display_name":"Nanoelectronics","level":2,"score":0.42136604},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.41120553},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3206501},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.19477254},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.14044374},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.13207412},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0804683},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/icra.2012.6225230","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[],"grants":[],"datasets":[],"versions":[],"referenced_works_count":26,"referenced_works":["https://openalex.org/W1964872309","https://openalex.org/W1987416224","https://openalex.org/W2001031519","https://openalex.org/W2001927367","https://openalex.org/W2015248366","https://openalex.org/W2018054297","https://openalex.org/W2020256670","https://openalex.org/W2022521646","https://openalex.org/W2029236613","https://openalex.org/W2032554914","https://openalex.org/W2036563033","https://openalex.org/W2055307846","https://openalex.org/W2064812684","https://openalex.org/W2077609143","https://openalex.org/W2083946996","https://openalex.org/W2086542095","https://openalex.org/W2089776731","https://openalex.org/W2100861947","https://openalex.org/W2104988869","https://openalex.org/W2107817533","https://openalex.org/W2109513073","https://openalex.org/W2134903991","https://openalex.org/W2138736802","https://openalex.org/W2152479613","https://openalex.org/W2157923049","https://openalex.org/W2162078053"],"related_works":["https://openalex.org/W4319984450","https://openalex.org/W4297921203","https://openalex.org/W4200066560","https://openalex.org/W2947942993","https://openalex.org/W2385877031","https://openalex.org/W2381853949","https://openalex.org/W2364197227","https://openalex.org/W2353550828","https://openalex.org/W2043853631","https://openalex.org/W1984461958"],"abstract_inverted_index":{"Nanowire":[0],"field-effect":[1],"transistors":[2],"(nano-FETs)":[3],"are":[4,87],"nano":[5],"devices":[6,21,91],"capable":[7],"of":[8,13,37,61,103,110,119],"highly":[9],"sensitive,":[10],"label-free":[11],"sensing":[12],"molecules.":[14],"However,":[15],"significant":[16],"variations":[17],"in":[18],"sensitivity":[19],"across":[20,133],"can":[22],"result":[23],"from":[24],"poor":[25],"control":[26,60],"over":[27],"device":[28],"parameters,":[29],"such":[30],"as":[31],"nanowire":[32,49,62,74,96],"diameter":[33],"and":[34,54,64,77,97,122],"the":[35],"number":[36,63],"electrode-bridging":[38],"nanowires.":[39],"This":[40,113],"paper":[41],"presents":[42],"a":[43,94,101,107,116],"fabrication":[44],"approach":[45],"that":[46],"uses":[47,55],"wafer-scale":[48,120],"contact":[50,75],"printing":[51,76],"for":[52,58,126],"throughput":[53],"automated":[56,123],"nanomanipulation":[57,81],"precision":[59],"diameter.":[65],"The":[66],"process":[67],"requires":[68],"only":[69],"one":[70],"photolithography":[71],"mask.":[72],"Using":[73],"post":[78],"processing":[79],"(i.e.,":[80],"inside":[82],"scanning":[83],"electron":[84],"microscope),":[85],"we":[86],"able":[88],"to":[89],"produce":[90],"all":[92],"with":[93,106,130],"single":[95],"similar":[98],"diameters":[99],"at":[100],"speed":[102],"\u223c1":[104],"min/device":[105],"success":[108],"rate":[109],"95%":[111],"(n=500).":[112],"technology":[114],"represents":[115],"seamless":[117],"integration":[118],"microfabrication":[121],"nanorobotic":[124],"manipulation":[125],"producing":[127],"nano-FET":[128],"sensors":[129],"consistent":[131],"response":[132],"devices.":[134]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W1994289509","counts_by_year":[{"year":2014,"cited_by_count":1}],"updated_date":"2024-12-17T17:39:46.530529","created_date":"2016-06-24"}