{"id":"https://openalex.org/W2534365844","doi":"https://doi.org/10.1109/icmens.2006.348212","title":"Complete Analysis of a Novel Fully Symmetric Decoupled Micromachined Gyroscope","display_name":"Complete Analysis of a Novel Fully Symmetric Decoupled Micromachined Gyroscope","publication_year":2006,"publication_date":"2006-12-01","ids":{"openalex":"https://openalex.org/W2534365844","doi":"https://doi.org/10.1109/icmens.2006.348212","mag":"2534365844"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2006.348212","pdf_url":null,"source":{"id":"https://openalex.org/S4306419674","display_name":"International Conference on MEMS, NANO, and Smart Systems","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_indexed_in_scopus":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5059096633","display_name":"A. Sharaf","orcid":"https://orcid.org/0000-0003-1857-3993"},"institutions":[],"countries":["EG"],"is_corresponding":false,"raw_author_name":"Abdelhameed Sharaf","raw_affiliation_strings":["NCRRT, AEA, Cairo, Egypt"],"affiliations":[{"raw_affiliation_string":"NCRRT, AEA, Cairo, Egypt","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110064986","display_name":"Sherif Sedky","orcid":null},"institutions":[],"countries":["EG"],"is_corresponding":false,"raw_author_name":"Sherif Sedky","raw_affiliation_strings":["Physics Department, AUC, 113 Kasr El Eini Street, 1215, Cairo, Egypt","STRC, AUC, 113 Kasr El Eini Street, 1215, Cairo, Egypt"],"affiliations":[{"raw_affiliation_string":"Physics Department, AUC, 113 Kasr El Eini Street, 1215, Cairo, Egypt","institution_ids":[]},{"raw_affiliation_string":"STRC, AUC, 113 Kasr El Eini Street, 1215, Cairo, Egypt","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5015083411","display_name":"S. E. D. Habib","orcid":"https://orcid.org/0000-0002-6324-6740"},"institutions":[{"id":"https://openalex.org/I145487455","display_name":"Cairo University","ror":"https://ror.org/03q21mh05","country_code":"EG","type":"funder","lineage":["https://openalex.org/I145487455"]}],"countries":["EG"],"is_corresponding":false,"raw_author_name":"S. E.-D. Habib","raw_affiliation_strings":["Electronics and Communications Department Faculty of Engineering, Cairo University, Giza, Egypt"],"affiliations":[{"raw_affiliation_string":"Electronics and Communications Department Faculty of Engineering, Cairo University, Giza, Egypt","institution_ids":["https://openalex.org/I145487455"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.427,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":3,"citation_normalized_percentile":{"value":0.435993,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":72,"max":74},"biblio":{"volume":null,"issue":null,"first_page":"35","last_page":"40"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9999,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.999,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/decoupling","display_name":"Decoupling (probability)","score":0.73601353},{"id":"https://openalex.org/keywords/mechanical-resonance","display_name":"Mechanical Resonance","score":0.6061763},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.59657866},{"id":"https://openalex.org/keywords/oscillation","display_name":"Oscillation (cell signaling)","score":0.5252347}],"concepts":[{"id":"https://openalex.org/C205606062","wikidata":"https://www.wikidata.org/wiki/Q5249645","display_name":"Decoupling (probability)","level":2,"score":0.73601353},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.7077052},{"id":"https://openalex.org/C143141573","wikidata":"https://www.wikidata.org/wiki/Q7450971","display_name":"Sense (electronics)","level":2,"score":0.69080436},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6700226},{"id":"https://openalex.org/C196348190","wikidata":"https://www.wikidata.org/wiki/Q3744733","display_name":"Mechanical resonance","level":3,"score":0.6061763},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.59657866},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5650271},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.5581501},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.5340895},{"id":"https://openalex.org/C2778439541","wikidata":"https://www.wikidata.org/wiki/Q7106412","display_name":"Oscillation (cell signaling)","level":2,"score":0.5252347},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.50546575},{"id":"https://openalex.org/C38976095","wikidata":"https://www.wikidata.org/wiki/Q752641","display_name":"Asymmetry","level":2,"score":0.47311732},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.458089},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.41147757},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3517726},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.30165368},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.25845757},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.25312597},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.23146561},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2146546},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.14932132},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.1432277},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.09800032},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.07604197},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2006.348212","pdf_url":null,"source":{"id":"https://openalex.org/S4306419674","display_name":"International Conference on MEMS, NANO, and Smart Systems","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_indexed_in_scopus":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.63}],"grants":[],"datasets":[],"versions":[],"referenced_works_count":19,"referenced_works":["https://openalex.org/W1918552860","https://openalex.org/W1984876317","https://openalex.org/W2005070766","https://openalex.org/W2016189502","https://openalex.org/W2024623944","https://openalex.org/W2025450851","https://openalex.org/W2041406399","https://openalex.org/W2112655896","https://openalex.org/W2121426505","https://openalex.org/W2149128480","https://openalex.org/W2152788544","https://openalex.org/W2158728151","https://openalex.org/W2161403805","https://openalex.org/W2164679795","https://openalex.org/W2171671401","https://openalex.org/W2177580458","https://openalex.org/W2332186534","https://openalex.org/W2500428251","https://openalex.org/W4254323856"],"related_works":["https://openalex.org/W4320019880","https://openalex.org/W4312831286","https://openalex.org/W2387531099","https://openalex.org/W2371137103","https://openalex.org/W2363375256","https://openalex.org/W2185308786","https://openalex.org/W2138812454","https://openalex.org/W2039007435","https://openalex.org/W2018733833","https://openalex.org/W2003271389"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"on":[3],"a":[4],"novel":[5],"fully":[6,55],"symmetric":[7,56],"decoupled":[8],"micromachined":[9],"gyroscope":[10],"(FSDMG).":[11],"The":[12,30,54,68,109,133,145,166,189],"proposed":[13],"sensor":[14,111],"has":[15],"five":[16],"masses,":[17],"electrostatically":[18],"driven":[19],"to":[20,41,47,59],"primary":[21],"mode":[22],"oscillation,":[23],"and":[24,38,51,85,89,94,100,114,122,135,141,151,196,202],"senses,":[25],"capacitively,":[26],"the":[27,43,48,61,66,81,126,186,194],"output":[28,64,167],"signal.":[29],"new":[31],"structure":[32,57],"achieves":[33,169],"complete":[34],"decoupling":[35,52],"between":[36],"drive":[37,113,134,150],"sense":[39,86,115,136,152,187],"modes":[40,116],"minimize":[42],"mechanical":[44,88,195],"crosstalk,":[45],"thanks":[46],"intermediate":[49],"mass":[50],"beams.":[53],"helps":[58],"lower":[60,130],"zero":[62],"rate":[63],"of":[65,77,119,154,192],"sensor.":[67],"manufacturing":[69],"asymmetry":[70],"can":[71],"be":[72],"overcome":[73],"by":[74],"four":[75],"sets":[76],"adjustable":[78],"electrodes":[79],"surrounding":[80],"outer":[82],"frame.":[83],"Drive":[84],"amplitudes,":[87],"electrical":[90,197],"sensitivities,":[91],"quality":[92],"factor":[93],"approximated":[95],"bandwidth":[96],"are":[97,102,138,199],"extracted":[98],"analytically":[99],"results":[101,180],"confirmed":[103],"using":[104,147],"finite":[105],"element":[106],"analysis":[107],"(FEA).":[108],"designed":[110],"shows":[112,149],"resonance":[117,164],"frequencies":[118],"6391":[120],"Hz":[121,124,157],"6393":[123],"respectively;":[125],"frequency":[127,153],"mismatch":[128,162],"is":[129],"than":[131],"0.03%.":[132],"capacitance":[137],"0.098":[139],"pF":[140,143],"0.23":[142],"respectively.":[144],"FEA":[146],"ANSYS":[148],"6187and":[155],"6199":[156],"respectively":[158,205],"for":[159,173],"only":[160],"0.2%":[161],"in":[163,181,185],"frequency.":[165],"signal":[168],"70":[170],"nm":[171],"amplitude":[172],"1":[174],"deg/s":[175],"input":[176],"rotation":[177],"rate,":[178],"which":[179],"0.83":[182],"aF":[183],"change":[184],"capacitance.":[188],"numerical":[190],"value":[191],"both":[193],"sensitivities":[198],"0.07":[200],"mum/(deg/s)":[201],"17.5":[203],"mV/(deg/s)":[204]},"abstract_inverted_index_v3":null,"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2534365844","counts_by_year":[],"updated_date":"2025-04-19T07:55:21.505019","created_date":"2016-10-28"}