{"id":"https://openalex.org/W1973000679","doi":"https://doi.org/10.1109/icicdt.2012.6232856","title":"Analytical modeling of parasitics in monolithically integrated 3D inverters","display_name":"Analytical modeling of parasitics in monolithically integrated 3D inverters","publication_year":2012,"publication_date":"2012-05-01","ids":{"openalex":"https://openalex.org/W1973000679","doi":"https://doi.org/10.1109/icicdt.2012.6232856","mag":"1973000679"},"language":"en","primary_location":{"is_oa":true,"landing_page_url":"https://doi.org/10.1109/icicdt.2012.6232856","pdf_url":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6232856","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6232856","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111667600","display_name":"J. Lacord","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]},{"id":"https://openalex.org/I4210139715","display_name":"Institut de Micro\u00e9lectronique, Electromagn\u00e9tisme et Photonique","ror":"https://ror.org/03taa9n66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210139715","https://openalex.org/I70900168","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Lacord","raw_affiliation_strings":["IMEP-LAHC GRENOBLE, Grenoble, France","STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"IMEP-LAHC GRENOBLE, Grenoble, France","institution_ids":["https://openalex.org/I4210139715"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045610872","display_name":"P. Batude","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Batude","raw_affiliation_strings":["LETI Minatec, CEA, Grenoble, France"],"affiliations":[{"raw_affiliation_string":"LETI Minatec, CEA, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I899635006","https://openalex.org/I106785703"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011270757","display_name":"G. Ghibaudo","orcid":"https://orcid.org/0000-0001-9901-0679"},"institutions":[{"id":"https://openalex.org/I4210139715","display_name":"Institut de Micro\u00e9lectronique, Electromagn\u00e9tisme et Photonique","ror":"https://ror.org/03taa9n66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210139715","https://openalex.org/I70900168","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Ghibaudo","raw_affiliation_strings":["IMEP-LAHC GRENOBLE, Grenoble, France"],"affiliations":[{"raw_affiliation_string":"IMEP-LAHC GRENOBLE, Grenoble, France","institution_ids":["https://openalex.org/I4210139715"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5091096177","display_name":"F. B\u0153uf","orcid":"https://orcid.org/0000-0002-1710-5170"},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"F. Boeuf","raw_affiliation_strings":["STMicroelectronics, Crolles, France"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":0,"max":64},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9994,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9964,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/parasitic-extraction","display_name":"Parasitic extraction","score":0.95652616},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"Parasitic capacitance","score":0.7705697},{"id":"https://openalex.org/keywords/solid-modeling","display_name":"Solid modeling","score":0.45096216},{"id":"https://openalex.org/keywords/bar","display_name":"Bar (unit)","score":0.43765733}],"concepts":[{"id":"https://openalex.org/C159818811","wikidata":"https://www.wikidata.org/wiki/Q7135947","display_name":"Parasitic extraction","level":2,"score":0.95652616},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.7705697},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7521056},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5900465},{"id":"https://openalex.org/C108882727","wikidata":"https://www.wikidata.org/wiki/Q2991685","display_name":"Solid modeling","level":2,"score":0.45096216},{"id":"https://openalex.org/C188721877","wikidata":"https://www.wikidata.org/wiki/Q103510","display_name":"Bar (unit)","level":2,"score":0.43765733},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4312955},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.41225538},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.36904192},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.30318493},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.28411937},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.20546198},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.07598716},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":true,"landing_page_url":"https://doi.org/10.1109/icicdt.2012.6232856","pdf_url":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6232856","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true}],"best_oa_location":{"is_oa":true,"landing_page_url":"https://doi.org/10.1109/icicdt.2012.6232856","pdf_url":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6232856","source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true},"sustainable_development_goals":[],"grants":[],"datasets":[],"versions":[],"referenced_works_count":10,"referenced_works":["https://openalex.org/W1859174109","https://openalex.org/W1981823766","https://openalex.org/W2045821110","https://openalex.org/W2059435272","https://openalex.org/W2111184962","https://openalex.org/W2112520364","https://openalex.org/W2131498597","https://openalex.org/W2144149750","https://openalex.org/W2148106742","https://openalex.org/W2291715131"],"related_works":["https://openalex.org/W63447294","https://openalex.org/W4396689093","https://openalex.org/W4304890870","https://openalex.org/W4210807885","https://openalex.org/W2999380399","https://openalex.org/W2904654231","https://openalex.org/W2394034449","https://openalex.org/W2248915580","https://openalex.org/W2058545256","https://openalex.org/W2051045034"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3],"estimate":[4],"using":[5],"an":[6],"analytical":[7],"model":[8],"the":[9],"parasitic":[10],"capacitances":[11],"of":[12],"3D":[13,17],"inverters":[14],"based":[15],"on":[16],"sequential":[18],"integration.":[19],"Total":[20],"capacitance":[21],"and":[22,32,35],"delay":[23],"are":[24],"evaluated":[25],"for":[26],"two":[27],"different":[28],"contact":[29],"schemes":[30],"(plug":[31],"bar":[33],"contact)":[34],"compared":[36],"with":[37],"a":[38],"2D":[39],"reference.":[40]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W1973000679","counts_by_year":[],"updated_date":"2024-12-07T11:35:57.744252","created_date":"2016-06-24"}