{"id":"https://openalex.org/W2104347658","doi":"https://doi.org/10.1109/etfa.2008.4638364","title":"An IEC 61499 based run-to-run controller for chemical mechanical planarization process","display_name":"An IEC 61499 based run-to-run controller for chemical mechanical planarization process","publication_year":2008,"publication_date":"2008-09-01","ids":{"openalex":"https://openalex.org/W2104347658","doi":"https://doi.org/10.1109/etfa.2008.4638364","mag":"2104347658"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/etfa.2008.4638364","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110248985","display_name":"K.M. Goh","orcid":null},"institutions":[{"id":"https://openalex.org/I168639165","display_name":"Singapore Institute of Technology","ror":"https://ror.org/01v2c2791","country_code":"SG","type":"education","lineage":["https://openalex.org/I168639165"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"K.M. Goh","raw_affiliation_strings":["Singapore Inst. of Manuf. Technol., Singapore"],"affiliations":[{"raw_affiliation_string":"Singapore Inst. of Manuf. Technol., Singapore","institution_ids":["https://openalex.org/I168639165"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049413459","display_name":"Benny Tjahjono","orcid":"https://orcid.org/0000-0001-7503-7500"},"institutions":[{"id":"https://openalex.org/I82284825","display_name":"Cranfield University","ror":"https://ror.org/05cncd958","country_code":"GB","type":"education","lineage":["https://openalex.org/I82284825"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"B. Tjahjono","raw_affiliation_strings":["Cranfield University , UK"],"affiliations":[{"raw_affiliation_string":"Cranfield University , UK","institution_ids":["https://openalex.org/I82284825"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007909358","display_name":"Abdul Manaf","orcid":"https://orcid.org/0000-0001-5765-7335"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"A. Manaf","raw_affiliation_strings":["Nanyang Technological University (Singapore)"],"affiliations":[{"raw_affiliation_string":"Nanyang Technological University (Singapore)","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5058567520","display_name":"A.J.R. Aendenroomer","orcid":null},"institutions":[{"id":"https://openalex.org/I4210091207","display_name":"Singapore Institute of Manufacturing Technology","ror":"https://ror.org/00f44np30","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210091207","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"A.J.R. Aendenroomer","raw_affiliation_strings":["Singapore Institute of Manufacturing Technology, Singapore"],"affiliations":[{"raw_affiliation_string":"Singapore Institute of Manufacturing Technology, Singapore","institution_ids":["https://openalex.org/I4210091207"]}]}],"institution_assertions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":0,"max":63},"biblio":{"volume":null,"issue":null,"first_page":"25","last_page":"28"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T11741","display_name":"Flexible and Reconfigurable Manufacturing Systems","score":0.9987,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11741","display_name":"Flexible and Reconfigurable Manufacturing Systems","score":0.9987,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9961,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9892,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chemical-mechanical-planarization","display_name":"Chemical Mechanical Planarization","score":0.9789715}],"concepts":[{"id":"https://openalex.org/C180088628","wikidata":"https://www.wikidata.org/wiki/Q1069404","display_name":"Chemical-mechanical planarization","level":3,"score":0.9789715},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.72778255},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6727996},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6328221},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.54920053},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.42049873},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.34636122},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.32711685},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.21679893},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1949476},{"id":"https://openalex.org/C138113353","wikidata":"https://www.wikidata.org/wiki/Q611639","display_name":"Polishing","level":2,"score":0.18406981},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.16350463},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/etfa.2008.4638364","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[],"grants":[],"datasets":[],"versions":[],"referenced_works_count":4,"referenced_works":["https://openalex.org/W149518273","https://openalex.org/W2021690815","https://openalex.org/W2129375545","https://openalex.org/W2158660760"],"related_works":["https://openalex.org/W74903192","https://openalex.org/W3114821107","https://openalex.org/W2668822080","https://openalex.org/W2489206082","https://openalex.org/W2350003910","https://openalex.org/W2163264803","https://openalex.org/W2155451298","https://openalex.org/W2130148791","https://openalex.org/W1999768459","https://openalex.org/W1495339469"],"abstract_inverted_index":{"The":[0],"paper":[1],"presented":[2],"the":[3,16,20,25,52,61,68,81],"IEC":[4],"61499":[5],"based":[6,23],"Run-To-Run":[7],"Controller":[8],"for":[9,40,51],"Chemical":[10],"Mechanical":[11],"Planarization":[12],"process.":[13],"Experiments":[14],"show":[15],"needs":[17],"of":[18,67],"adjust":[19],"removal":[21,38,45,71],"rate":[22,39,46,72],"on":[24],"actual":[26],"data":[27],"captured":[28,87],"from":[29,83],"manufacturing":[30],"line":[31],"rather":[32],"than":[33],"default":[34],"values":[35],"to":[36,47],"calculate":[37,48],"every":[41],"lot":[42,54],"and":[43,74,80,88],"use":[44],"polish":[49,62,75],"time":[50,76],"next":[53,59],"which":[55],"would":[56],"be":[57],"polished":[58],"in":[60],"tool.":[63],"Two":[64],"key":[65],"components":[66,85],"controller":[69],"namely":[70],"calculation":[73,77],"was":[78,86],"developed":[79],"result":[82],"both":[84],"analyzed.":[89]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2104347658","counts_by_year":[],"updated_date":"2024-12-11T07:42:05.685412","created_date":"2016-06-24"}