{"id":"https://openalex.org/W2168468838","doi":"https://doi.org/10.1109/cicc.2005.1568757","title":"Three-dimensional impedance engineering for mixed-signal system-on-chip applications","display_name":"Three-dimensional impedance engineering for mixed-signal system-on-chip applications","publication_year":2006,"publication_date":"2006-01-18","ids":{"openalex":"https://openalex.org/W2168468838","doi":"https://doi.org/10.1109/cicc.2005.1568757","mag":"2168468838"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2005.1568757","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015340928","display_name":"Kyuchul Chong","orcid":null},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"funder","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"None Kyuchul Chong","raw_affiliation_strings":["Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023909501","display_name":"Xi Zhang","orcid":"https://orcid.org/0000-0002-2910-4773"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"funder","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"None Xi Zhang","raw_affiliation_strings":["Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061216998","display_name":"K. N. Tu","orcid":"https://orcid.org/0000-0002-7781-2707"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"funder","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"None King-Ning Tu","raw_affiliation_strings":["Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025564795","display_name":"Daquan Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"funder","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"None Daquan Huang","raw_affiliation_strings":["Department of Electrical Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051454330","display_name":"Mau-Chung Frank Chang","orcid":"https://orcid.org/0000-0002-2934-9359"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"funder","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"None Mau-Chung Frank Chang","raw_affiliation_strings":["Department of Electrical Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5010924468","display_name":"Ya\u2010Hong Xie","orcid":"https://orcid.org/0000-0003-0971-4280"},"institutions":[{"id":"https://openalex.org/I161318765","display_name":"University of California, Los Angeles","ror":"https://ror.org/046rm7j60","country_code":"US","type":"funder","lineage":["https://openalex.org/I161318765"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"None Ya-Hong Xie","raw_affiliation_strings":["Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I161318765"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.427,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":1,"citation_normalized_percentile":{"value":0.281375,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":61,"max":68},"biblio":{"volume":null,"issue":null,"first_page":"658","last_page":"661"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9999,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9999,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.9997,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9993,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/crosstalk","display_name":"Crosstalk","score":0.43798453},{"id":"https://openalex.org/keywords/limiting","display_name":"Limiting","score":0.4342256}],"concepts":[{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.55411613},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.4628932},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4554725},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.43923426},{"id":"https://openalex.org/C169822122","wikidata":"https://www.wikidata.org/wiki/Q230187","display_name":"Crosstalk","level":2,"score":0.43798453},{"id":"https://openalex.org/C188198153","wikidata":"https://www.wikidata.org/wiki/Q1613840","display_name":"Limiting","level":2,"score":0.4342256},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.38434422},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33552626},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3236239},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.316745},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2527544},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.14951089},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2005.1568757","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.53}],"grants":[],"datasets":[],"versions":[],"referenced_works_count":11,"referenced_works":["https://openalex.org/W1583899113","https://openalex.org/W1972463652","https://openalex.org/W2107708627","https://openalex.org/W2109020656","https://openalex.org/W2148498078","https://openalex.org/W2159190658","https://openalex.org/W2162157834","https://openalex.org/W2167004581","https://openalex.org/W2171749186","https://openalex.org/W2788994432","https://openalex.org/W2892048148"],"related_works":["https://openalex.org/W4388636991","https://openalex.org/W4298625141","https://openalex.org/W4280525841","https://openalex.org/W2972114982","https://openalex.org/W2807571008","https://openalex.org/W2622826586","https://openalex.org/W2560789951","https://openalex.org/W2167472940","https://openalex.org/W2061961527","https://openalex.org/W1975375876"],"abstract_inverted_index":{"An":[0],"innovative":[1],"and":[2,46,76],"manufacturable":[3],"technology":[4],"for":[5,28,43,72],"three-dimensional":[6],"substrate":[7,26],"impedance":[8],"engineering":[9],"based":[10],"on":[11],"p":[12],"-":[15],"/p":[16],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">+":[19],"Si":[20,53],"substrates,":[21],"which":[22],"meets":[23],"the":[24,59,62,69],"stringent":[25],"requirement":[27],"high":[29],"performance":[30],"system-on-chip":[31],"applications,":[32],"is":[33,37,56],"described.":[34],"Electroless":[35],"plating":[36],"used":[38],"to":[39],"fabricate":[40],"Faraday":[41],"cage":[42],"crosstalk":[44],"isolation":[45],"true":[47],"ground":[48],"contacts.":[49],"A":[50],"self-limiting":[51],"porous":[52],"formation":[54],"process":[55],"employed":[57],"from":[58],"backside":[60],"of":[61],"wafer.":[63],"On-chip":[64],"inductors":[65],"are":[66],"situated":[67],"above":[68],"PS":[70],"allowing":[71],"greatly":[73],"increased":[74],"Q-factor":[75],"resonance":[77],"frequency":[78]},"abstract_inverted_index_v3":null,"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2168468838","counts_by_year":[],"updated_date":"2025-04-24T17:20:52.651147","created_date":"2016-06-24"}