{"id":"https://openalex.org/W2120493193","doi":"https://doi.org/10.1109/cicc.2002.1012882","title":"Modularized low temperature LNO/PZT/LNO ferroelectric capacitor-over-interconnect (COI) FeRAM for advanced SOC (ASOC) application","display_name":"Modularized low temperature LNO/PZT/LNO ferroelectric capacitor-over-interconnect (COI) FeRAM for advanced SOC (ASOC) application","publication_year":2003,"publication_date":"2003-06-25","ids":{"openalex":"https://openalex.org/W2120493193","doi":"https://doi.org/10.1109/cicc.2002.1012882","mag":"2120493193"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2002.1012882","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103364345","display_name":"S.L. Lung","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"S.L. Lung","raw_affiliation_strings":["Macronix International Company Limited, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Company Limited, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050773496","display_name":"Dennis Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"D. Lin","raw_affiliation_strings":["Macronix International Company Limited, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Company Limited, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017078278","display_name":"S.S. Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"S.S. Chen","raw_affiliation_strings":["Macronix International Company Limited, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Company Limited, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009480509","display_name":"Gengsheng Weng","orcid":"https://orcid.org/0000-0002-7335-8009"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"G. Weng","raw_affiliation_strings":["Macronix International Company Limited, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Company Limited, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043466299","display_name":"C.L. Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"funder","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C.L. Liu","raw_affiliation_strings":["National Tsing Hua University, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110169675","display_name":"Sheng-Chih Lai","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"S.C. Lai","raw_affiliation_strings":["Macronix International Company Limited, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Company Limited, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086316062","display_name":"Che\u2010Wei Tsai","orcid":"https://orcid.org/0000-0003-3072-7916"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C.W. Tsai","raw_affiliation_strings":["Macronix International Company Limited, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Company Limited, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103106739","display_name":"T.B. Wu","orcid":"https://orcid.org/0009-0005-8553-8196"},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"funder","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"T.B. Wu","raw_affiliation_strings":["National Tsing Hua University, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046308578","display_name":"R. Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"R. Liu","raw_affiliation_strings":["Macronix International Company Limited, Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Company Limited, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.109,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":1,"citation_normalized_percentile":{"value":0.443341,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":59,"max":66},"biblio":{"volume":null,"issue":null,"first_page":"479","last_page":"482"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":0.9989,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.9984,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ferroelectric-ram","display_name":"Ferroelectric RAM","score":0.96182996},{"id":"https://openalex.org/keywords/lanio","display_name":"Lanio","score":0.7909603},{"id":"https://openalex.org/keywords/ferroelectric-capacitor","display_name":"Ferroelectric capacitor","score":0.5521766}],"concepts":[{"id":"https://openalex.org/C161164327","wikidata":"https://www.wikidata.org/wiki/Q703656","display_name":"Ferroelectric RAM","level":4,"score":0.96182996},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8484808},{"id":"https://openalex.org/C2779614792","wikidata":"https://www.wikidata.org/wiki/Q1093396","display_name":"Lanio","level":4,"score":0.7909603},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.75657403},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.70685065},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.59344727},{"id":"https://openalex.org/C189366214","wikidata":"https://www.wikidata.org/wiki/Q4103842","display_name":"Ferroelectric capacitor","level":4,"score":0.5521766},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5199665},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.50834936},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.4755946},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.32351848},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.30828643},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.30379614},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.17777613},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.17017224},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.12417191},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2002.1012882","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.42,"id":"https://metadata.un.org/sdg/7"}],"grants":[],"datasets":[],"versions":[],"referenced_works_count":5,"referenced_works":["https://openalex.org/W2070034895","https://openalex.org/W2091139011","https://openalex.org/W2539397873","https://openalex.org/W2543093452","https://openalex.org/W2543985758"],"related_works":["https://openalex.org/W3213606764","https://openalex.org/W2953255424","https://openalex.org/W2389813843","https://openalex.org/W2346143700","https://openalex.org/W2166508075","https://openalex.org/W2158951459","https://openalex.org/W2122610418","https://openalex.org/W2120493193","https://openalex.org/W1980889554","https://openalex.org/W1977120737"],"abstract_inverted_index":{"Embedded":[0],"FeRAM":[1,79],"module":[2],"is":[3,20,33,61,73,87,91],"achieved":[4,81],"by":[5,82],"a":[6],"low":[7,57,84],"temperature":[8,27,85],"capacitor-over-interconnect":[9],"(COI)":[10],"process.":[11],"A":[12],"conductive":[13],"perovskite":[14],"LaNiO/sub":[15],"3/":[16],"(LNO)":[17],"bottom":[18],"electrode":[19,65],"used":[21,62],"as":[22,63],"seed":[23],"layer,":[24],"the":[25,67,70],"crystallization":[26],"of":[28,66],"in-situ":[29],"sputter":[30],"deposited":[31],"PZT":[32,50,52],"greatly":[34,74],"reduced":[35],"from":[36],"600/spl":[37],"deg/C":[38,44],"to":[39,53],"350":[40],"/spl":[41],"deg/C/spl":[42],"sim/400/spl":[43],"LNO's":[45],"near-perfect":[46],"lattice":[47],"match":[48],"with":[49],"allows":[51],"growth":[54],"epitaxially":[55],"at":[56],"temperature.":[58],"When":[59],"LNO":[60],"top":[64],"ferroelectric":[68],"capacitor,":[69],"fatigue":[71],"performance":[72],"improved.":[75],"The":[76],"COI":[77],"LNO/PZT/LNO":[78],"structure":[80],"this":[83],"process":[86],"completely":[88],"modular":[89],"and":[90],"ideal":[92],"for":[93],"advanced":[94],"Cu/low-K":[95],"SOC":[96],"application.":[97]},"abstract_inverted_index_v3":null,"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2120493193","counts_by_year":[],"updated_date":"2025-03-18T16:01:18.912526","created_date":"2016-06-24"}