{"id":"https://openalex.org/W2163370175","doi":"https://doi.org/10.1109/10.914797","title":"Characteristics of silicon nitride after O/sub 2/ plasma surface treatment for pH-ISFET applications","display_name":"Characteristics of silicon nitride after O/sub 2/ plasma surface treatment for pH-ISFET applications","publication_year":2001,"publication_date":"2001-03-01","ids":{"openalex":"https://openalex.org/W2163370175","doi":"https://doi.org/10.1109/10.914797","mag":"2163370175","pmid":"https://pubmed.ncbi.nlm.nih.gov/11327502"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/10.914797","pdf_url":null,"source":{"id":"https://openalex.org/S5240358","display_name":"IEEE Transactions on Biomedical Engineering","issn_l":"0018-9294","issn":["0018-9294","1558-2531"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"journal-article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015458983","display_name":"Li\u2010Te Yin","orcid":null},"institutions":[{"id":"https://openalex.org/I151221077","display_name":"Chung Yuan Christian University","ror":"https://ror.org/02w8ws377","country_code":"TW","type":"education","lineage":["https://openalex.org/I151221077"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"None Li-Te Yin","raw_affiliation_strings":["Department of Bio-Medical Engineering, Chung Yuan Christian University, Chungli, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Bio-Medical Engineering, Chung Yuan Christian University, Chungli, Taiwan","institution_ids":["https://openalex.org/I151221077"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028872552","display_name":"Jung-Chuan Chou","orcid":"https://orcid.org/0000-0002-8829-3404"},"institutions":[{"id":"https://openalex.org/I75357094","display_name":"National Yunlin University of Science and Technology","ror":"https://ror.org/04qkq2m54","country_code":"TW","type":"education","lineage":["https://openalex.org/I75357094"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"None Jung-Chuan Chou","raw_affiliation_strings":["Institute of Electronic and Information Engineering, National Yunlin University of Science and Technology, Toulin, Taiwan"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic and Information Engineering, National Yunlin University of Science and Technology, Toulin, Taiwan","institution_ids":["https://openalex.org/I75357094"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052927241","display_name":"Wen\u2010Yaw Chung","orcid":"https://orcid.org/0000-0002-2579-2476"},"institutions":[{"id":"https://openalex.org/I151221077","display_name":"Chung Yuan Christian University","ror":"https://ror.org/02w8ws377","country_code":"TW","type":"education","lineage":["https://openalex.org/I151221077"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"None Wen-Yaw Chung","raw_affiliation_strings":["Department of Electronic Engineering, Chung Yuan Christian University, Chungli, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, Chung Yuan Christian University, Chungli, Taiwan","institution_ids":["https://openalex.org/I151221077"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110873914","display_name":"Tai-Ping Sun","orcid":null},"institutions":[{"id":"https://openalex.org/I193365169","display_name":"National Chi Nan University","ror":"https://ror.org/03ha6v181","country_code":"TW","type":"education","lineage":["https://openalex.org/I193365169"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"None Tai-Ping Sun","raw_affiliation_strings":["Department of Electrical Engineering, National Chi Nan University, Nantou, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chi Nan University, Nantou, Taiwan","institution_ids":["https://openalex.org/I193365169"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109248862","display_name":"Shen-Kan Hsiung","orcid":null},"institutions":[{"id":"https://openalex.org/I151221077","display_name":"Chung Yuan Christian University","ror":"https://ror.org/02w8ws377","country_code":"TW","type":"education","lineage":["https://openalex.org/I151221077"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"None Shen-Ken Hsiung","raw_affiliation_strings":["Department of Electronic Engineering, Chung Yuan Christian University, Chungli, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, Chung Yuan Christian University, Chungli, Taiwan","institution_ids":["https://openalex.org/I151221077"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.677,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":38,"citation_normalized_percentile":{"value":0.877615,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":91},"biblio":{"volume":"48","issue":"3","first_page":"340","last_page":"344"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10212","display_name":"Electrochemical sensors and biosensors","score":0.9982,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9966,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/isfet","display_name":"ISFET","score":0.8928488},{"id":"https://openalex.org/keywords/glutaraldehyde","display_name":"Glutaraldehyde","score":0.7144933},{"id":"https://openalex.org/keywords/silicon-oxide","display_name":"Silicon oxide","score":0.43324113}],"concepts":[{"id":"https://openalex.org/C154275363","wikidata":"https://www.wikidata.org/wiki/Q904133","display_name":"ISFET","level":5,"score":0.8928488},{"id":"https://openalex.org/C2777529624","wikidata":"https://www.wikidata.org/wiki/Q416475","display_name":"Glutaraldehyde","level":2,"score":0.7144933},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.68683094},{"id":"https://openalex.org/C40875361","wikidata":"https://www.wikidata.org/wiki/Q2356542","display_name":"Reagent","level":2,"score":0.5911112},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.54785836},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.53538835},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.53281516},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5073628},{"id":"https://openalex.org/C160756335","wikidata":"https://www.wikidata.org/wiki/Q669391","display_name":"Biosensor","level":2,"score":0.4983201},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.44122246},{"id":"https://openalex.org/C2779105228","wikidata":"https://www.wikidata.org/wiki/Q2286029","display_name":"Silicon oxide","level":4,"score":0.43324113},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.40117246},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.37036127},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.36940885},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3408022},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.30600572},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2788254},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.22041619},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.14297092},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09249276},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.07487404},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[{"descriptor_ui":"D017736","descriptor_name":"Ion-Selective Electrodes","qualifier_ui":"","qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D008422","descriptor_name":"Materials Testing","qualifier_ui":"","qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D005949","descriptor_name":"Glucose Oxidase","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D005949","descriptor_name":"Glucose Oxidase","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D005976","descriptor_name":"Glutaral","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D005976","descriptor_name":"Glutaral","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006863","descriptor_name":"Hydrogen-Ion Concentration","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008872","descriptor_name":"Microwaves","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D011437","descriptor_name":"Propylamines","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012680","descriptor_name":"Sensitivity and Specificity","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012821","descriptor_name":"Silanes","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D012821","descriptor_name":"Silanes","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D013499","descriptor_name":"Surface Properties","qualifier_ui":"","qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014173","descriptor_name":"Transistors, Electronic","qualifier_ui":"","qualifier_name":null,"is_major_topic":false}],"locations_count":2,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/10.914797","pdf_url":null,"source":{"id":"https://openalex.org/S5240358","display_name":"IEEE Transactions on Biomedical Engineering","issn_l":"0018-9294","issn":["0018-9294","1558-2531"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},{"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/11327502","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":["National Institutes of Health"],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[],"grants":[],"datasets":[],"versions":[],"referenced_works_count":12,"referenced_works":["https://openalex.org/W1997558313","https://openalex.org/W2004779230","https://openalex.org/W2008104812","https://openalex.org/W2017791990","https://openalex.org/W2039821150","https://openalex.org/W2043292659","https://openalex.org/W2056293139","https://openalex.org/W2070329533","https://openalex.org/W2070459469","https://openalex.org/W2085477285","https://openalex.org/W2125579197","https://openalex.org/W577800642"],"related_works":["https://openalex.org/W4240461230","https://openalex.org/W4226065539","https://openalex.org/W4225347794","https://openalex.org/W3186580402","https://openalex.org/W2980635270","https://openalex.org/W2538428564","https://openalex.org/W2333264988","https://openalex.org/W2163370175","https://openalex.org/W2083672075","https://openalex.org/W2024624086"],"abstract_inverted_index":{"Silicon":[0],"nitride":[1],"(Si/sub":[2],"3/N/sub":[3],"4/)":[4],"sensing":[5],"gate":[6],"pH-ion-selective":[7],"field":[8],"effect":[9],"transistors":[10],"(ISFETs)":[11],"were":[12,63,79,105],"treated":[13,106],"by":[14,107],"2.54-GHz":[15],"microwave":[16],"O/sub":[17],"2/":[18],"plasma,":[19],"the":[20,23,34,49,85,93],"results":[21],"show":[22],"ISFET":[24],"sensitivity":[25],"has":[26],"an":[27,76],"advantage":[28],"up":[29],"to":[30,45],"24%":[31],"increment":[32],"after":[33],"plasma":[35,50],"treatment.":[36],"Electron":[37],"spectroscopy":[38],"for":[39],"chemical":[40],"analysis":[41],"(ESCA)":[42],"is":[43,52],"used":[44,67,74],"make":[46],"sure":[47],"that":[48],"treatment":[51],"not":[53],"just":[54],"a":[55,69],"native":[56],"oxide":[57],"cleaning":[58],"procedure.":[59],"The":[60,81],"samples,":[61,91],"which":[62,104],"immobilized":[64,90,100],"with":[65],"glutaraldehyde":[66,89],"as":[68,75],"bifunctional":[70],"reagent":[71],"and":[72,88,92],"3-aminopropy-Itricthoxysilane":[73],"adhesion":[77],"promoter":[78],"studied.":[80],"binding":[82],"force":[83],"between":[84],"glucose":[86],"oxidase":[87],"element":[94],"concentrations":[95],"of":[96],"nitrogen":[97],"in":[98],"3-aminspropytriethoxysilane":[99],"samples":[101],"are":[102],"higher":[103],"plasma.":[108]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2163370175","counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":2}],"updated_date":"2024-12-12T06:53:02.139710","created_date":"2016-06-24"}