{"id":"https://openalex.org/W1997497767","doi":"https://doi.org/10.1016/j.microrel.2013.07.073","title":"Contoured device sample preparation technique for \u00b15\u03bcm remaining silicon thicknesses that meets solid immersion lens requirements","display_name":"Contoured device sample preparation technique for \u00b15\u03bcm remaining silicon thicknesses that meets solid immersion lens requirements","publication_year":2013,"publication_date":"2013-09-01","ids":{"openalex":"https://openalex.org/W1997497767","doi":"https://doi.org/10.1016/j.microrel.2013.07.073","mag":"1997497767"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.microrel.2013.07.073","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_indexed_in_scopus":true,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"journal-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079742582","display_name":"Chris Richardson","orcid":null},"institutions":[{"id":"https://openalex.org/I290598920","display_name":"California State University, Dominguez Hills","ror":"https://ror.org/04pyvbw03","country_code":"US","type":"funder","lineage":["https://openalex.org/I290598920"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Chris Richardson","raw_affiliation_strings":["Allied High Tech Products, Rancho Dominguez, CA 90220, USA"],"affiliations":[{"raw_affiliation_string":"Allied High Tech Products, Rancho Dominguez, CA 90220, USA","institution_ids":["https://openalex.org/I290598920"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058118345","display_name":"Gary Liechty","orcid":null},"institutions":[{"id":"https://openalex.org/I290598920","display_name":"California State University, Dominguez Hills","ror":"https://ror.org/04pyvbw03","country_code":"US","type":"funder","lineage":["https://openalex.org/I290598920"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gary Liechty","raw_affiliation_strings":["Allied High Tech Products, Rancho Dominguez, CA 90220, USA"],"affiliations":[{"raw_affiliation_string":"Allied High Tech Products, Rancho Dominguez, CA 90220, USA","institution_ids":["https://openalex.org/I290598920"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007764093","display_name":"Clay Smith","orcid":null},"institutions":[{"id":"https://openalex.org/I290598920","display_name":"California State University, Dominguez Hills","ror":"https://ror.org/04pyvbw03","country_code":"US","type":"funder","lineage":["https://openalex.org/I290598920"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Clay Smith","raw_affiliation_strings":["Allied High Tech Products, Rancho Dominguez, CA 90220, USA"],"affiliations":[{"raw_affiliation_string":"Allied High Tech Products, Rancho Dominguez, CA 90220, USA","institution_ids":["https://openalex.org/I290598920"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5034255621","display_name":"Michael Karow","orcid":null},"institutions":[{"id":"https://openalex.org/I290598920","display_name":"California State University, Dominguez Hills","ror":"https://ror.org/04pyvbw03","country_code":"US","type":"funder","lineage":["https://openalex.org/I290598920"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Michael Karow","raw_affiliation_strings":["Allied High Tech Products, Rancho Dominguez, CA 90220, USA"],"affiliations":[{"raw_affiliation_string":"Allied High Tech Products, Rancho Dominguez, CA 90220, USA","institution_ids":["https://openalex.org/I290598920"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2190,"currency":"USD","value_usd":2190},"apc_paid":null,"fwci":0.0,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":0,"max":65},"biblio":{"volume":"53","issue":"9-11","first_page":"1434","last_page":"1438"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9982,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9959,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sample","display_name":"Sample (material)","score":0.51917565},{"id":"https://openalex.org/keywords/immersion","display_name":"Immersion","score":0.51423115},{"id":"https://openalex.org/keywords/sample-preparation","display_name":"Sample Preparation","score":0.4324531}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6217995},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.60369116},{"id":"https://openalex.org/C198531522","wikidata":"https://www.wikidata.org/wiki/Q485146","display_name":"Sample (material)","level":2,"score":0.51917565},{"id":"https://openalex.org/C199068039","wikidata":"https://www.wikidata.org/wiki/Q574523","display_name":"Immersion (mathematics)","level":2,"score":0.51423115},{"id":"https://openalex.org/C15336307","wikidata":"https://www.wikidata.org/wiki/Q1766051","display_name":"Lens (geology)","level":2,"score":0.5061628},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.44696215},{"id":"https://openalex.org/C2778576202","wikidata":"https://www.wikidata.org/wiki/Q2540164","display_name":"Sample preparation","level":2,"score":0.4324531},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3823414},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36796755},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28764957},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.063049495},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.microrel.2013.07.073","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_indexed_in_scopus":true,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[],"grants":[],"datasets":[],"versions":[],"referenced_works_count":6,"referenced_works":["https://openalex.org/W2006040137","https://openalex.org/W2057003969","https://openalex.org/W3111483828","https://openalex.org/W3113903618","https://openalex.org/W3117244679","https://openalex.org/W3118081300"],"related_works":["https://openalex.org/W44660823","https://openalex.org/W4206445530","https://openalex.org/W2944964251","https://openalex.org/W2810180604","https://openalex.org/W2771786520","https://openalex.org/W2325281603","https://openalex.org/W2104300577","https://openalex.org/W2101030291","https://openalex.org/W2034653092","https://openalex.org/W2012754971"],"abstract_inverted_index":null,"abstract_inverted_index_v3":null,"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W1997497767","counts_by_year":[],"updated_date":"2025-02-11T02:32:24.096510","created_date":"2016-06-24"}