乐胖代购免代理版

{"id":"https://openalex.org/W1987753622","doi":"https://doi.org/10.1016/j.mejo.2007.07.079","title":"Surface micromachined RF MEMS variable capacitor","display_name":"Surface micromachined RF MEMS variable capacitor","publication_year":2007,"publication_date":"2007-08-01","ids":{"openalex":"https://openalex.org/W1987753622","doi":"https://doi.org/10.1016/j.mejo.2007.07.079","mag":"1987753622"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mejo.2007.07.079","pdf_url":null,"source":{"id":"https://openalex.org/S4394736632","display_name":"Microelectronics Journal","issn_l":"0026-2692","issn":["0026-2692"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"journal-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036748512","display_name":"Dongming Fang","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Dong-Ming Fang","raw_affiliation_strings":["Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#"],"affiliations":[{"raw_affiliation_string":"Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038373479","display_name":"Shi Fu","orcid":"https://orcid.org/0000-0001-7476-6955"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Shi Fu","raw_affiliation_strings":["Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#"],"affiliations":[{"raw_affiliation_string":"Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011961584","display_name":"Ying Cao","orcid":"https://orcid.org/0000-0001-5529-0656"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ying Cao","raw_affiliation_strings":["Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#"],"affiliations":[{"raw_affiliation_string":"Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037106751","display_name":"Yong Zhou","orcid":"https://orcid.org/0000-0002-2925-3912"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yong Zhou","raw_affiliation_strings":["Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#"],"affiliations":[{"raw_affiliation_string":"Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101463508","display_name":"Xiaolin Zhao","orcid":"https://orcid.org/0000-0002-3321-633X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xiao-Lin Zhao","raw_affiliation_strings":["Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#"],"affiliations":[{"raw_affiliation_string":"Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and T ...#TAB#","institution_ids":[]}]}],"institution_assertions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.026,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":15,"citation_normalized_percentile":{"value":0.791948,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":86,"max":87},"biblio":{"volume":"38","issue":"8-9","first_page":"855","last_page":"859"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9993,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/variable-capacitor","display_name":"Variable capacitor","score":0.89757085}],"concepts":[{"id":"https://openalex.org/C171496939","wikidata":"https://www.wikidata.org/wiki/Q1347410","display_name":"Variable capacitor","level":4,"score":0.89757085},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.84136975},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.80238426},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.69609916},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.635054},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.61436754},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.43817002},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42703828},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4261481},{"id":"https://openalex.org/C182365436","wikidata":"https://www.wikidata.org/wiki/Q50701","display_name":"Variable (mathematics)","level":2,"score":0.41147643},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22051126},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.1347388},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.115835935},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.08911362},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mejo.2007.07.079","pdf_url":null,"source":{"id":"https://openalex.org/S4394736632","display_name":"Microelectronics Journal","issn_l":"0026-2692","issn":["0026-2692"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8}],"grants":[],"datasets":[],"versions":[],"referenced_works_count":16,"referenced_works":["https://openalex.org/W1520953191","https://openalex.org/W1972245501","https://openalex.org/W2006748967","https://openalex.org/W2067707080","https://openalex.org/W2069854651","https://openalex.org/W2075676934","https://openalex.org/W2133126207","https://openalex.org/W2137740860","https://openalex.org/W2146312611","https://openalex.org/W2152345429","https://openalex.org/W2160572146","https://openalex.org/W2164568139","https://openalex.org/W2534335605","https://openalex.org/W3114394434","https://openalex.org/W3118542600","https://openalex.org/W4230992772"],"related_works":["https://openalex.org/W4249160945","https://openalex.org/W2902734054","https://openalex.org/W2170420442","https://openalex.org/W2135932837","https://openalex.org/W2103208520","https://openalex.org/W2097366056","https://openalex.org/W2029602509","https://openalex.org/W2007915900","https://openalex.org/W2005975803","https://openalex.org/W2001013121"],"abstract_inverted_index":{"We":[0],"used":[1],"simple":[2],"microelectromechanical":[3],"systems":[4],"(MEMS)":[5],"technology":[6],"to":[7],"fabricate":[8],"low-voltage-controlled":[9],"variable":[10,20,41],"capacitors":[11],"with":[12],"high-quality":[13],"factor.":[14],"The":[15,36,47,60],"surface":[16,34],"profile":[17],"of":[18,25,39,69],"the":[19,40,66,70],"capacitor":[21,42,71],"at":[22,52],"different":[23],"values":[24],"applied":[26],"voltage":[27,38,62],"is":[28,63,72],"measured":[29],"using":[30],"WYKO":[31],"NT1100":[32],"optical":[33],"profiler.":[35],"pull-in":[37,61],"was":[43],"below":[44],"15":[45],"V.":[46],"capacitance":[48],"and":[49,57],"quality":[50],"factor":[51],"1":[53],"GHz":[54],"are":[55],"0.792":[56],"51.6":[58],"pF.":[59],"13.5":[64],"V,":[65],"tuning":[67],"ratio":[68],"more":[73],"than":[74],"1.31:1.":[75]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W1987753622","counts_by_year":[{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2024-12-06T00:50:42.603620","created_date":"2016-06-24"}