{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,6,18]],"date-time":"2024-06-18T00:24:28Z","timestamp":1718670268969},"reference-count":58,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2024,6,17]],"date-time":"2024-06-17T00:00:00Z","timestamp":1718582400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","award":["DUT22YG238"],"id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"Smart wearable devices are extensively utilized across diverse domains due to their inherent advantages of flexibility, portability, and real-time monitoring. Among these, flexible sensors demonstrate exceptional pliability and malleability, making them a prominent focus in wearable electronics research. However, the implementation of flexible wearable sensors often entails intricate and time-consuming processes, leading to high costs, which hinder the advancement of the entire field. Here, we report a pressure and proximity sensor based on oxidized laser-induced graphene (oxidized LIG) as a dielectric layer sandwiched by patterned LIG electrodes, which is characterized by high speed and cost-effectiveness. It is found that in the low-frequency range of fewer than 0.1 kHz, the relative dielectric constant of the oxidized LIG layer reaches an order of magnitude of 104. The pressure mode of this bimodal capacitive sensor is capable of detecting pressures within the range of 1.34 Pa to 800 Pa, with a response time of several hundred milliseconds. The proximity mode involves the application of stimulation using an acrylic probe, which demonstrates a detection range from 0.05 mm to 37.8 mm. Additionally, it has a rapid response time of approximately 100 ms, ensuring consistent signal variations throughout both the approach and withdrawal phases. The sensor fabrication method proposed in this project effectively minimizes expenses and accelerates the preparation cycle through precise control of laser processing parameters to shape the electrode-dielectric layer-electrode within a single substrate material. Based on their exceptional combined performance, our pressure and proximity sensors exhibit significant potential in practical applications such as motion monitoring and distance detection.<\/jats:p>","DOI":"10.3390\/s24123907","type":"journal-article","created":{"date-parts":[[2024,6,17]],"date-time":"2024-06-17T10:29:43Z","timestamp":1718620183000},"page":"3907","source":"Crossref","is-referenced-by-count":0,"title":["A Pressure and Proximity Sensor Based on Laser-Induced Graphene"],"prefix":"10.3390","volume":"24","author":[{"given":"Jiatong","family":"Ye","sequence":"first","affiliation":[{"name":"School of Biomedical Engineering, Faculty of Medicine, Dalian University of Technology, Dalian 116024, China"}]},{"given":"Tiancong","family":"Zhao","sequence":"additional","affiliation":[{"name":"School of Biomedical Engineering, Faculty of Medicine, Dalian University of Technology, Dalian 116024, China"}]},{"ORCID":"http:\/\/orcid.org\/0000-0002-5392-8019","authenticated-orcid":false,"given":"Hangyu","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Biomedical Engineering, Faculty of Medicine, Dalian University of Technology, Dalian 116024, China"},{"name":"Liaoning Key Laboratory of Integrated Circuit and Biomedical Electronic System, Dalian University of Technology, Dalian 116024, China"}]}],"member":"1968","published-online":{"date-parts":[[2024,6,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"565","DOI":"10.6023\/A16030156","article-title":"Research Progress in Flexible Wearable Electronic Sensors","volume":"74","author":"Qian","year":"2016","journal-title":"Acta Chim. Sin."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1594","DOI":"10.1039\/D1TC05304C","article-title":"Flexible capacitive pressure sensors for wearable electronics","volume":"10","author":"Wang","year":"2022","journal-title":"J. Mater. Chem. C"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1455","DOI":"10.1080\/09205063.2024.2334974","article-title":"Recent advances in wearable flexible electronic skin: Types, power supply methods, and development prospects","volume":"35","author":"Tian","year":"2024","journal-title":"J. Biomater. Sci. Polym. Ed."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Xu, F., Li, X., Shi, Y., Li, L., Wang, W., He, L., and Liu, R. (2018). Recent Developments for Flexible Pressure Sensors: A Review. Micromachines, 9.","DOI":"10.3390\/mi9110580"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Papani, R., Li, Y., and Wang, S. (2024). Soft mechanical sensors for wearable and implantable applications. WIREs Nanomed. Nanobiotechnol., 16.","DOI":"10.1002\/wnan.1961"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1151","DOI":"10.1080\/00405000.2012.664868","article-title":"A single-layer stitched electrotextile as flexible pressure mapping sensor","volume":"103","author":"Zhang","year":"2012","journal-title":"J. Text. Inst."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"3644","DOI":"10.1039\/D2TC05439F","article-title":"A brushed hemicylindrical pressure sensor based on triboelectricity exhibits high sensitivity, a low detection limit and a wide detection range","volume":"11","author":"Zhou","year":"2023","journal-title":"J. Mater. Chem. C"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Jia, W., Zhang, Q., Cheng, Y., Wang, J., Zhang, H., Sang, S., and Ji, J. (2022). A Flexible Capacitive Paper-Based Pressure Sensor Fabricated Using 3D Printing. Chemosensors, 10.","DOI":"10.3390\/chemosensors10100432"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"151660","DOI":"10.1016\/j.cej.2024.151660","article-title":"Ion gradient induced self-powered flexible pressure sensor","volume":"490","author":"Huang","year":"2024","journal-title":"Chem. Eng. J."},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Das, P.S., Skaf, D., Rose, L., Motaghedi, F., Carmichael, T.B., Rondeau-Gagn\u00e9, S., and Ahamed, M.J. (2024). Gait Pattern Analysis: Integration of a Highly Sensitive Flexible Pressure Sensor on a Wireless Instrumented Insole. Sensors, 24.","DOI":"10.3390\/s24092944"},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Zhao, T., Zhu, H., and Zhang, H. (2023). Rapid Prototyping Flexible Capacitive Pressure Sensors Based on Porous Electrodes. Biosensors, 13.","DOI":"10.3390\/bios13050546"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"178102-1","DOI":"10.7498\/aps.69.20200987","article-title":"Sensing mechanisms and applications of flexible pressure sensors","volume":"69","author":"Hou","year":"2020","journal-title":"Acta Phys. Sin."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"22212","DOI":"10.1021\/acsami.0c05819","article-title":"Wearable Capacitive Pressure Sensor Based on MXene Composite Nanofibrous Scaffolds for Reliable Human Physiological Signal Acquisition","volume":"12","author":"Sharma","year":"2020","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Yuan, Y., Liu, B., Li, H., Li, M., Song, Y., Wang, R., Wang, T., and Zhang, H. (2022). Flexible Wearable Sensors in Medical Monitoring. Biosensors, 12.","DOI":"10.3390\/bios12121069"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"7166","DOI":"10.1021\/acsnano.9b02596","article-title":"Laser-Induced Graphene Triboelectric Nanogenerators","volume":"13","author":"Stanford","year":"2019","journal-title":"ACS Nano"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"128790","DOI":"10.1016\/j.snb.2020.128790","article-title":"Graphene oxide humidity sensor with laser-induced graphene porous electrodes","volume":"325","author":"Zhu","year":"2020","journal-title":"Sens. Actuators B Chem."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"167","DOI":"10.1016\/j.bios.2018.10.015","article-title":"Molecularly-imprinted chloramphenicol sensor with laser-induced graphene electrodes","volume":"124\u2013125","author":"Cardoso","year":"2019","journal-title":"Biosens. Bioelectron."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"2201952","DOI":"10.1002\/admt.202201952","article-title":"Smart Wooden Home Enabled by Direct-Written Laser-Induced Graphene","volume":"8","author":"Nam","year":"2023","journal-title":"Adv. Mater. Technol."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"158696","DOI":"10.1016\/j.apsusc.2023.158696","article-title":"Enhanced performance of densified laser-induced graphene supercapacitor electrodes in dimpled polyimide","volume":"643","author":"Ryu","year":"2024","journal-title":"Appl. Surf. Sci."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"3867","DOI":"10.1021\/acsaelm.1c00480","article-title":"One-Step Fabrication of Low-Resistance Conductors on 3D-Printed Structures by Laser-Induced Graphene","volume":"3","author":"Gilavan","year":"2021","journal-title":"ACS Appl. Electron. Mater."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"287","DOI":"10.1016\/j.carbon.2017.11.014","article-title":"Visible light laser-induced graphene from phenolic resin: A new approach for directly writing graphene-based electrochemical devices on various substrates","volume":"127","author":"Zhang","year":"2018","journal-title":"Carbon"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"3033","DOI":"10.1007\/s12274-021-3441-9","article-title":"Laser-induced graphene for bioelectronics and soft actuators","volume":"14","author":"Xu","year":"2021","journal-title":"Nano Res."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"2205158","DOI":"10.1002\/adfm.202205158","article-title":"Recent Advances in Laser-Induced Graphene: Mechanism, Fabrication, Properties, and Applications in Flexible Electronics","volume":"32","author":"Le","year":"2022","journal-title":"Adv. Funct. Mater."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"2201761","DOI":"10.1002\/admt.202201761","article-title":"Multifunctional Ultraviolet Laser Induced Graphene for Flexible Artificial Sensory Neuron","volume":"8","author":"Long","year":"2023","journal-title":"Adv. Mater. Technol."},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Akintola, T.M., Kumar, B.K., and Dickens, T. (2023). Combined Additive and Laser-Induced Processing of Functional Structures for Monitoring under Deformation. Polymers, 15.","DOI":"10.3390\/polym15020443"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"385","DOI":"10.1016\/j.carbon.2020.03.043","article-title":"Laser induced self-N-doped porous graphene as an electrochemical biosensor for femtomolar miRNA detection","volume":"163","author":"Wan","year":"2020","journal-title":"Carbon"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"19563","DOI":"10.1021\/acsami.0c02774","article-title":"Highly Sensitive and Wide Linear-Response Pressure Sensors Featuring Zero Standby Power Consumption under Bending Conditions","volume":"12","author":"Yi","year":"2020","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"9710","DOI":"10.1021\/acsami.9b18873","article-title":"Bean Pod-Inspired Ultrasensitive and Self-Healing Pressure Sensor Based on Laser-Induced Graphene and Polystyrene Microsphere Sandwiched Structure","volume":"12","author":"Tian","year":"2020","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Liu, Y.M., Hou, C.L., Jiao, T.F., Song, J.W., Zhang, X., Xing, R.R., Zhou, J.X., Zhang, L.X., and Peng, Q.M. (2018). Self-Assembled AgNP-Containing Nanocomposites Constructed by Electrospinning as Efficient Dye Photocatalyst Materials for Wastewater Treatment. Nanomaterials, 8.","DOI":"10.3390\/nano8010035"},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Jirickova, A., Jankovsky, O., Sofer, Z., and Sedmidubsky, D. (2022). Synthesis and Applications of Graphene Oxide. Materials, 15.","DOI":"10.3390\/ma15030920"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"711","DOI":"10.1002\/smll.200901934","article-title":"Graphene Oxide, Highly Reduced Graphene Oxide, and Graphene: Versatile Building Blocks for Carbon-Based Materials","volume":"6","author":"Compton","year":"2010","journal-title":"Small"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"9411","DOI":"10.1021\/ma101456y","article-title":"Alternate Multilayer Films of Poly(vinyl alcohol) and Exfoliated Graphene Oxide Fabricated via a Facial Layer-by-Layer Assembly","volume":"43","author":"Zhao","year":"2010","journal-title":"Macromolecules"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"552","DOI":"10.1039\/C4RA11971A","article-title":"Fabrication of morphology controlled graphene oxide-dye composite films at the air-water interface","volume":"5","author":"Sinoforoglu","year":"2015","journal-title":"RSC Adv."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"1705850","DOI":"10.1002\/adma.201705850","article-title":"Plasma-Assisted Synthesis and Surface Modification of Electrode Materials for Renewable Energy","volume":"30","author":"Dou","year":"2018","journal-title":"Adv. Mater."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"6061","DOI":"10.1039\/c2jm15572a","article-title":"Low temperature plasma-mediated synthesis of graphene nanosheets for supercapacitor electrodes","volume":"22","author":"Zhou","year":"2012","journal-title":"J. Mater. Chem."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"111987","DOI":"10.1016\/j.sna.2020.111987","article-title":"Multi-function sensor based on rectangular-lattice photonic crystal fiber with high pressure sensitivity","volume":"310","author":"Zhang","year":"2020","journal-title":"Sens. Actuators A Phys."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"114500","DOI":"10.1016\/j.sna.2023.114500","article-title":"Research progress of multifunctional flexible proximity sensors","volume":"360","author":"Huang","year":"2023","journal-title":"Sens. Actuators A Phys."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"114460","DOI":"10.1016\/j.sna.2023.114460","article-title":"A highly sensitive flexible pressure sensor based on laser-induced graphene and a composite dielectric structure","volume":"358","author":"Zhao","year":"2023","journal-title":"Sens. Actuators A Phys."},{"key":"ref_39","doi-asserted-by":"crossref","unstructured":"Abera, B.D., Ortiz-G\u00f3mez, I., Shkodra, B., Romero, F.J., Cantarella, G., Petti, L., Salinas-Castillo, A., Lugli, P., and Rivadeneyra, A. (2021). Laser-Induced Graphene Electrodes Modified with a Molecularly Imprinted Polymer for Detection of Tetracycline in Milk and Meat. Sensors, 22.","DOI":"10.3390\/s22010269"},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"269","DOI":"10.1109\/TNANO.2020.2974994","article-title":"Enhancing the Performance of Polygon Monopole Antenna Using Graphene\/TMDCs Heterostructures","volume":"19","author":"Mohassieb","year":"2020","journal-title":"IEEE Trans. Nanotechnol."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"5714","DOI":"10.1038\/ncomms6714","article-title":"Laser-induced porous graphene films from commercial polymers","volume":"5","author":"Lin","year":"2014","journal-title":"Nat. Commun."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"5868","DOI":"10.1021\/acsnano.5b00436","article-title":"Flexible Boron-Doped Laser-Induced Graphene Microsupercapacitors","volume":"9","author":"Peng","year":"2015","journal-title":"ACS Nano"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"044002","DOI":"10.1088\/2058-8585\/aaed77","article-title":"Laser-induced electrodes towards low-cost flexible UV ZnO sensors","volume":"3","author":"Samouco","year":"2018","journal-title":"Flex. Print. Electron."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"53049","DOI":"10.1021\/acsami.0c13909","article-title":"Integrated Sensing and Warning Multifunctional Devices Based on the Combined Mechanical and Thermal Effect of Porous Graphene","volume":"12","author":"Huang","year":"2020","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"130","DOI":"10.1002\/cplu.201402192","article-title":"Oxygen-Plasma-Functionalized Carbon Nanotubes as Supports for Platinum\u2013Ruthenium Catalysts Applied in Electrochemical Methanol Oxidation","volume":"80","author":"Chetty","year":"2014","journal-title":"ChemPlusChem"},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"1707319","DOI":"10.1002\/adma.201707319","article-title":"Oxidized Laser-Induced Graphene for Efficient Oxygen Electrocatalysis","volume":"30","author":"Zhang","year":"2018","journal-title":"Adv. Mater."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"247","DOI":"10.1016\/j.apsusc.2007.07.120","article-title":"Surface characterization of oxygen-functionalized multi-walled carbon nanotubes by high-resolution X-ray photoelectron spectroscopy and temperature-programmed desorption","volume":"254","author":"Xia","year":"2007","journal-title":"Appl. Surf. Sci."},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"2810","DOI":"10.1016\/j.electacta.2008.11.029","article-title":"Oxidization of carbon nanotubes through hydroxyl radical induced by pulsed O2 plasma and its application for O2 reduction in electro-Fenton","volume":"54","author":"Zhang","year":"2009","journal-title":"Electrochim. Acta"},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"11647","DOI":"10.1021\/jp4017097","article-title":"Functionalization of Multiwall Carbon Nanotubes by Ozone at Basic pH. Comparison with Oxygen Plasma and Ozone in Gas Phase","volume":"117","author":"Melguizo","year":"2013","journal-title":"J. Phys. Chem. C"},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"153","DOI":"10.1016\/j.carbon.2004.08.033","article-title":"High resolution XPS characterization of chemical functionalised MWCNTs and SWCNTs","volume":"43","author":"Okpalugo","year":"2005","journal-title":"Carbon"},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"063108","DOI":"10.1063\/1.4818337","article-title":"Graphene-based thin film supercapacitor with graphene oxide as dielectric spacer","volume":"103","author":"Liu","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"ref_52","doi-asserted-by":"crossref","unstructured":"Ye, Y., Deng, J., Shen, S., Hou, Z., and Liu, Y. (2016). A Novel Method for Proximity Detection of Moving Targets Using a Large-Scale Planar Capacitive Sensor System. Sensors, 16.","DOI":"10.3390\/s16050699"},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"2261","DOI":"10.1021\/acsmaterialslett.2c00860","article-title":"High-Performance Flexible Capacitive Proximity and Pressure Sensors with Spiral Electrodes for Continuous Human-Machine Interaction","volume":"4","author":"Huang","year":"2022","journal-title":"ACS Mater. Lett."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"1748","DOI":"10.1109\/JSEN.2009.2030660","article-title":"Dual-Mode Capacitive Proximity Sensor for Robot Application: Implementation of Tactile and Proximity Sensing Capability on a Single Polymer Platform Using Shared Electrodes","volume":"9","author":"Lee","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"45325","DOI":"10.1109\/ACCESS.2020.2977716","article-title":"A Review on Applications of Capacitive Displacement Sensing for Capacitive Proximity Sensor","volume":"8","author":"Ye","year":"2020","journal-title":"IEEE Access"},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"2433","DOI":"10.1002\/adma.201500009","article-title":"Conductive Fiber-Based Ultrasensitive Textile Pressure Sensor for Wearable Electronics","volume":"27","author":"Lee","year":"2015","journal-title":"Adv. Mater."},{"key":"ref_57","doi-asserted-by":"crossref","first-page":"48594","DOI":"10.1021\/acsami.9b17966","article-title":"Anodized Aluminum Oxide-Assisted Low-Cost Flexible Capacitive Pressure Sensors Based on Double-Sided Nanopillars by a Facile Fabrication Method","volume":"11","author":"Guo","year":"2019","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_58","doi-asserted-by":"crossref","first-page":"39420","DOI":"10.1039\/C7RA06997A","article-title":"Flexible piezocapacitive sensors based on wrinkled microstructures: Toward low-cost fabrication of pressure sensors over large areas","volume":"7","author":"Baek","year":"2017","journal-title":"RSC Adv."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/12\/3907\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,6,17]],"date-time":"2024-06-17T10:56:36Z","timestamp":1718621796000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/12\/3907"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,6,17]]},"references-count":58,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2024,6]]}},"alternative-id":["s24123907"],"URL":"https:\/\/doi.org\/10.3390\/s24123907","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2024,6,17]]}}}