{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,4,16]],"date-time":"2025-04-16T02:31:10Z","timestamp":1744770670139,"version":"3.37.3"},"reference-count":50,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2024,3,26]],"date-time":"2024-03-26T00:00:00Z","timestamp":1711411200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2022YFB3205600"],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Excellent Youth Foundation of Chongqing Scientific Committee","award":["cstc2021jcyj-jqX0030"]},{"name":"West Light Foundation of the Chinese Academy of Sciences"},{"DOI":"10.13039\/501100004739","name":"Youth Innovation Promotion Association, Chinese Academy of Sciences","doi-asserted-by":"publisher","award":["2022388","2023401"],"id":[{"id":"10.13039\/501100004739","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Natural Science Foundation of Chongqing, China","award":["CSTB2023NSCQ-MSX0071"]},{"name":"Science Foundation of CIGIT, China","award":["E355400201"]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"The sensitivity and accuracy of nanopore sensors are severely hindered by the high noise associated with solid-state nanopores. To mitigate this issue, the deposition of organic polymer materials onto silicon nitride (SiNx) membranes has been effective in obtaining low-noise measurements. Nonetheless, the fabrication of nanopores sub-10 nm on thin polymer membranes remains a significant challenge. This work proposes a method for fabricating nanopores on polymethyl methacrylate (PMMA) membrane by the local high electrical field controlled breakdown, exploring the impact of voltage and current on the breakdown of PMMA membranes and discussing the mechanism underlying the breakdown voltage and current during the formation of nanopores. By improving the electric field application method, transient high electric fields that are one\u2013seven times higher than the breakdown electric field can be utilized to fabricate nanopores. A comparative analysis was performed on the current noise levels of nanopores in PMMA-SiNx composite membranes and SiNx nanopores with a 5 nm diameter. The results demonstrated that the fast fabrication of nanopores on PMMA-SiNx membranes exhibited reduced current noise compared to SiNx nanopores. This finding provides evidence supporting the feasibility of utilizing this technology for efficiently fabricating low-noise nanopores on polymer composite membranes.<\/jats:p>","DOI":"10.3390\/s24072109","type":"journal-article","created":{"date-parts":[[2024,3,26]],"date-time":"2024-03-26T15:05:33Z","timestamp":1711465533000},"page":"2109","source":"Crossref","is-referenced-by-count":1,"title":["Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown"],"prefix":"10.3390","volume":"24","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5515-6393","authenticated-orcid":false,"given":"Shaoxi","family":"Fang","sequence":"first","affiliation":[{"name":"Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China"}]},{"given":"Delin","family":"Zeng","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2192-7177","authenticated-orcid":false,"given":"Shixuan","family":"He","sequence":"additional","affiliation":[{"name":"Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China"}]},{"given":"Yadong","family":"Li","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China"}]},{"given":"Zichen","family":"Pang","sequence":"additional","affiliation":[{"name":"School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China"}]},{"given":"Yunjiao","family":"Wang","sequence":"additional","affiliation":[{"name":"Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China"}]},{"given":"Liyuan","family":"Liang","sequence":"additional","affiliation":[{"name":"Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China"}]},{"given":"Ting","family":"Weng","sequence":"additional","affiliation":[{"name":"Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China"}]},{"given":"Wanyi","family":"Xie","sequence":"additional","affiliation":[{"name":"Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3151-6769","authenticated-orcid":false,"given":"Deqiang","family":"Wang","sequence":"additional","affiliation":[{"name":"Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China"},{"name":"School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065, China"}]}],"member":"1968","published-online":{"date-parts":[[2024,3,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"931","DOI":"10.1038\/s41578-020-0229-6","article-title":"Solid-state nanopore sensors","volume":"5","author":"Xue","year":"2020","journal-title":"Nat. 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