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With substrate removal and an ideal anti-reflective coating, we estimated the internal quantum efficiency as achieving 77% at 1.55 \u03bcm. The best measured dark current density reached 5 nA\/cm2 at \u22120.1 V and at 23 \u00b0C. The main contributors responsible for this dark current were investigated through the study of its evolution with temperature. We also highlight the importance of passivation with a perimetric contribution analysis and the correlation between MIS capacitance characterization and dark current performance.<\/jats:p>","DOI":"10.3390\/s23229219","type":"journal-article","created":{"date-parts":[[2023,11,16]],"date-time":"2023-11-16T13:19:43Z","timestamp":1700140783000},"page":"9219","source":"Crossref","is-referenced-by-count":0,"title":["Design and Characterization of 5 \u03bcm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"http:\/\/orcid.org\/0009-0000-6046-4251","authenticated-orcid":false,"given":"Jules","family":"Tillement","sequence":"first","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38054 Crolles, France"},{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"},{"name":"CNRS LTM, 38054 Grenoble, France"}]},{"given":"Cyril","family":"Cervera","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"}]},{"given":"Jacques","family":"Baylet","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"}]},{"given":"Christophe","family":"Jany","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"}]},{"given":"Fran\u00e7ois","family":"Nardelli","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"}]},{"given":"Thomas","family":"Di Rito","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"}]},{"given":"Sylvain","family":"Georges","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38054 Crolles, France"}]},{"given":"Gabriel","family":"Mugny","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38054 Crolles, France"}]},{"given":"Olivier","family":"Saxod","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"}]},{"given":"Olivier","family":"Gravrand","sequence":"additional","affiliation":[{"name":"Univ. Grenoble Alpes, CEA, Leti, F38000 Grenoble, France"}]},{"ORCID":"http:\/\/orcid.org\/0000-0001-5005-6596","authenticated-orcid":false,"given":"Thierry","family":"Baron","sequence":"additional","affiliation":[{"name":"CNRS LTM, 38054 Grenoble, France"}]},{"ORCID":"http:\/\/orcid.org\/0000-0003-1992-8477","authenticated-orcid":false,"given":"Fran\u00e7ois","family":"Roy","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38054 Crolles, France"}]},{"ORCID":"http:\/\/orcid.org\/0000-0002-1710-5170","authenticated-orcid":false,"given":"Fr\u00e9d\u00e9ric","family":"Boeuf","sequence":"additional","affiliation":[{"name":"STMicroelectronics, 850 Rue Jean Monnet, 38054 Crolles, France"}]}],"member":"1968","published-online":{"date-parts":[[2023,11,16]]},"reference":[{"key":"ref_1","unstructured":"Clouet, A., Chalak, A., Domengie, F., and Bouhamri, Z. (2023). 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