{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T14:53:33Z","timestamp":1740149613004,"version":"3.37.3"},"reference-count":38,"publisher":"MDPI AG","issue":"20","license":[{"start":{"date-parts":[[2023,10,11]],"date-time":"2023-10-11T00:00:00Z","timestamp":1696982400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Shenzhen Stable Supporting Program","award":["WDZC20200820200655001"]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["62275142"],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"}]},{"DOI":"10.13039\/501100021171","name":"Basic and Applied Basic Research Foundation of Guangdong Province","doi-asserted-by":"crossref","award":["2021B1515120007"],"id":[{"id":"10.13039\/501100021171","id-type":"DOI","asserted-by":"crossref"}]},{"DOI":"10.13039\/501100004147","name":"Tsinghua University","doi-asserted-by":"crossref","award":["QD2020001N"],"id":[{"id":"10.13039\/501100004147","id-type":"DOI","asserted-by":"crossref"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"Most existing multi-channel spectrometers are constructed by physically stacking single-channel spectrometers, resulting in their large size, high weight, and limited number of channels. Therefore, their miniaturization is urgently needed. In this paper, a microlens array grating is designed for miniature multi-channel spectrometers. A transmissive element integrating microlens arrays and gratings, the MLAG, enables simultaneous focusing and dispersion. Using soft lithography, the MLAG was fabricated with a deviation of less than 2.2%. The dimensions are 10 mm \u00d7 10 mm \u00d7 4 mm with over 2000 available units. The MLAG spectrometer operates in the 400\u2013700 nm wavelength range with a resolution of 6 nm. Additionally, the designed MLAG multi-channel spectrometer is experimentally verified to have independently valid cells that can be used in multichannel spectrometers. The wavelength position repeatability deviation of each cell is about 0.5 nm, and the repeatability of displacement measurements by the chromatic confocal sensor with the designed MLAG multi-channel spectrometer is less than 0.5 \u03bcm.<\/jats:p>","DOI":"10.3390\/s23208381","type":"journal-article","created":{"date-parts":[[2023,10,11]],"date-time":"2023-10-11T06:11:01Z","timestamp":1697004661000},"page":"8381","source":"Crossref","is-referenced-by-count":5,"title":["A Microlens Array Grating for Miniature Multi-Channel Spectrometers"],"prefix":"10.3390","volume":"23","author":[{"given":"Shuonan","family":"Shan","sequence":"first","affiliation":[{"name":"Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"}]},{"given":"Jingwen","family":"Li","sequence":"additional","affiliation":[{"name":"Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"},{"name":"Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China"}]},{"given":"Peiyuan","family":"Liu","sequence":"additional","affiliation":[{"name":"Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"}]},{"given":"Qiaolin","family":"Li","sequence":"additional","affiliation":[{"name":"Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"}]},{"given":"Xiaohao","family":"Wang","sequence":"additional","affiliation":[{"name":"Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"},{"name":"Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China"}]},{"given":"Xinghui","family":"Li","sequence":"additional","affiliation":[{"name":"Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"},{"name":"Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China"}]}],"member":"1968","published-online":{"date-parts":[[2023,10,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Gao, W. (2019). Metrology, Springer. Precision Manufacturing.","DOI":"10.1007\/978-981-10-4938-5"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Sato, R., Li, X., Fischer, A., Chen, L.-C., Chen, C., Shimomura, R., and Gao, W. (2023). Signal Processing and Artificial Intelligence for Dual-Detection Confocal Probes. Int. J. Precis. Eng. Manuf.","DOI":"10.1007\/s12541-023-00842-3"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Schifano, L., Berghmans, F., Dewitte, S., and Smeesters, L. (2022). Optical Design of a Novel Wide-Field-of-View Space-Based Spectrometer for Climate Monitoring. Sensors, 22.","DOI":"10.3390\/s22155841"},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Fathy, A., Gnambodoe-Capochichi, M., Sabry, Y.M., Anwar, M., Ghoname, A.O., Saeed, A., Leprince-Wang, Y., Khalil, D., and Bourouina, T. (2023). Potential of a Miniature Spectral Analyzer for District-Scale Monitoring of Multiple Gaseous Air Pollutants. Sensors, 23.","DOI":"10.3390\/s23146343"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"2204781","DOI":"10.1002\/adfm.202204781","article-title":"Bipolar Junction Transistor Exhibiting Excellent Output Characteristics with a Prompt Response against the Selective Protein","volume":"32","author":"Dastgeer","year":"2022","journal-title":"Adv. Funct. Mater."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Zhao, Q., Tong, L., and Gao, B. (2021). Spectral Analysis of Stationary Signals Based on Two Simplified Arrangements of Chirp Transform Spectrometer. Electronics, 10.","DOI":"10.3390\/electronics10010065"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Feng, L., He, X., Li, Y., Wei, L., Nie, Y., Jing, J., and Zhou, J. (2022). Compact Shortwave Infrared Imaging Spectrometer Based on a Catadioptric Prism. Sensors, 22.","DOI":"10.3390\/s22124611"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Zhang, X., Li, B., Jiang, X., Gu, G., Li, H., Wang, X., and Lin, G. (2023). Design of a Prism-Grating Wide Spectral Range Transmittance Imaging Spectrometer. Sensors, 23.","DOI":"10.3390\/s23115050"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"123113","DOI":"10.1063\/5.0022845","article-title":"Multi-Channel Fiber Optical Spectrometer for High-Throughput Characterization of Photoluminescence Properties","volume":"91","author":"Zhou","year":"2020","journal-title":"Rev. Sci. Instrum."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"2105331","DOI":"10.1002\/advs.202105331","article-title":"Directly Printed Embedded Metal Mesh for Flexible Transparent Electrode via Liquid Substrate Electric-Field-Driven Jet","volume":"9","author":"Li","year":"2022","journal-title":"Adv. Sci."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"143285","DOI":"10.1016\/j.cej.2023.143285","article-title":"Molecular Engineering of Biomimetic Donor-Acceptor Conjugated Microporous Polymers with Full-Spectrum Response and an Unusual Electronic Shuttle for Enhanced Uranium(VI) Photoreduction","volume":"466","author":"Yu","year":"2023","journal-title":"Chem. Eng. J."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2007772","DOI":"10.1002\/adma.202007772","article-title":"Templateless, Plating-Free Fabrication of Flexible Transparent Electrodes with Embedded Silver Mesh by Electric-Field-Driven Microscale 3D Printing and Hybrid Hot Embossing","volume":"33","author":"Zhu","year":"2021","journal-title":"Adv. Mater."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"eabe0722","DOI":"10.1126\/science.abe0722","article-title":"Miniaturization of Optical Spectrometers","volume":"371","author":"Yang","year":"2021","journal-title":"Science"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1364","DOI":"10.1107\/S1600577521007700","article-title":"Multi-Resolution Electron Spectrometer Array for Future Free-Electron Laser Experiments","volume":"28","author":"Walter","year":"2021","journal-title":"J. Synchrotron Radiat."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"215","DOI":"10.6028\/jres.114.015","article-title":"Procedures for Wavelength Calibration and Spectral Response Correction of CCD Array Spectrometers","volume":"114","author":"Gaigalas","year":"2009","journal-title":"J. Res. Natl. Inst. Stand. Technol."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"5719","DOI":"10.1364\/OE.27.005719","article-title":"Miniature Integrated Micro-Spectrometer Array for Snap Shot Multispectral Sensing","volume":"27","author":"Danz","year":"2019","journal-title":"Opt. Express"},{"key":"ref_17","unstructured":"(2023, July 12). MX2500 Series, Ocean Optics. Available online: www.oceaninsight.cn."},{"key":"ref_18","unstructured":"(2023, July 12). HORIBA OEM, HORIBA. Available online: www.horiba.com."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Wang, Y., Qu, Y., Zhao, H., and Fan, X. (2023). Construction, Spectral Modeling, Parameter Inversion-Based Calibration, and Application of an Echelle Spectrometer. Sensors, 23.","DOI":"10.3390\/s23146630"},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Wang, Q., Shen, H., Liu, W., Zhang, J., and Meng, L. (2022). Design of Compact Mid-Infrared Cooled Echelle Spectrometer Based on Toroidal Uniform-Line-Spaced (TULS) Grating. Sensors, 22.","DOI":"10.3390\/s22197291"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"290","DOI":"10.1117\/1.602359","article-title":"Holographically Recorded Gratings on Microlenses for a Miniaturized Spectrometer Array","volume":"39","author":"Traut","year":"2000","journal-title":"Opt. Eng."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"032501","DOI":"10.7567\/JJAP.53.032501","article-title":"Combined Blazed Grating and Microlens Array for Color Image Sensing","volume":"53","author":"Hirano","year":"2014","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"109733","DOI":"10.1016\/j.optmat.2020.109733","article-title":"Grating\/Microlens Arrays Fabricated by Hot-Melting, Self-Assembly and Replication","volume":"104","author":"Shi","year":"2020","journal-title":"Opt. Mater."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"165815","DOI":"10.1016\/j.jallcom.2022.165815","article-title":"Gate Modulation of the Spin Current in Graphene\/WSe2 van Der Waals Heterostructure at Room Temperature","volume":"919","author":"Dastgeer","year":"2022","journal-title":"J. Alloys Compd."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"100943","DOI":"10.1016\/j.mtphys.2022.100943","article-title":"Robust Approach towards Wearable Power Efficient Transistors with Low Subthreshold Swing","volume":"30","author":"Elahi","year":"2023","journal-title":"Mater. Today Phys."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"186","DOI":"10.1016\/j.precisioneng.2021.11.013","article-title":"Flexible Fabrication of Fresnel Micro-Lens Array by off-Spindle-Axis Diamond Turning and Precision Glass Molding","volume":"74","author":"Zhang","year":"2022","journal-title":"Precis. Eng."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"6079","DOI":"10.1364\/OE.26.006079","article-title":"Economic Fabrication of a Novel Hybrid Planar Grating\/Fresnel Lens for Miniature Spectrometers","volume":"26","author":"Zhou","year":"2018","journal-title":"Opt. Express"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1470","DOI":"10.1364\/OL.41.001470","article-title":"Design of a Variable-Line-Spacing Grating Pattern for Spectrometers Based on a Grating Fresnel Device","volume":"41","author":"Li","year":"2016","journal-title":"Opt. Lett."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"242","DOI":"10.1016\/j.optcom.2013.02.041","article-title":"Subwavelength Focusing of Micro Grating-Fresnel Lens","volume":"298\u2013299","author":"Ma","year":"2013","journal-title":"Opt. Commun."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"1123","DOI":"10.1016\/j.optmat.2010.03.013","article-title":"Diamond Double-Sided Micro-Lenses and Reflection Gratings","volume":"32","author":"Lee","year":"2010","journal-title":"Opt. Mater."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"491","DOI":"10.1038\/nprot.2009.234","article-title":"Soft Lithography for Micro- and Nanoscale Patterning","volume":"5","author":"Qin","year":"2010","journal-title":"Nat. Protoc."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"055012","DOI":"10.1088\/1361-6439\/aa68c8","article-title":"Manufacturing PDMS Micro Lens Array Using Spin Coating under a Multiphase System","volume":"27","author":"Sun","year":"2017","journal-title":"J. Micromechan. Microeng."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"732","DOI":"10.1364\/OE.24.000732","article-title":"Holographic Fabrication of Large-Constant Concave Gratings for Wide-Range Flat-Field Spectrometers with the Addition of a Concave Lens","volume":"24","author":"Zhou","year":"2016","journal-title":"Opt. Express"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"298","DOI":"10.1364\/AO.56.000298","article-title":"Improved Master-Replica Separation Process for Fabrication of a Blazed Concave Grating by Using a Combination-Type Convex Grating","volume":"56","author":"Li","year":"2017","journal-title":"Appl. Opt."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"503","DOI":"10.1016\/j.isatra.2020.01.038","article-title":"High-Efficiency Sub-Microscale Uncertainty Measurement Method Using Pattern Recognition","volume":"101","author":"Zhao","year":"2020","journal-title":"ISA Trans."},{"key":"ref_36","doi-asserted-by":"crossref","unstructured":"Jiang, W., Wang, H., Xie, W., and Qu, Z. (2023). Lithography Alignment Techniques Based on Moir\u00e9 Fringe. Photonics, 10.","DOI":"10.3390\/photonics10040351"},{"key":"ref_37","doi-asserted-by":"crossref","unstructured":"Gao, W., and Shimizu, Y. (2021). Optical Metrology for Precision Engineering, De Gruyter.","DOI":"10.1515\/9783110542363"},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"2237","DOI":"10.1177\/0003702817720468","article-title":"How to Design a Spectrometer","volume":"71","author":"Scheeline","year":"2017","journal-title":"Appl. Spectrosc."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/20\/8381\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,1,15]],"date-time":"2025-01-15T15:23:22Z","timestamp":1736954602000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/20\/8381"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,10,11]]},"references-count":38,"journal-issue":{"issue":"20","published-online":{"date-parts":[[2023,10]]}},"alternative-id":["s23208381"],"URL":"https:\/\/doi.org\/10.3390\/s23208381","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2023,10,11]]}}}