{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,3,22]],"date-time":"2025-03-22T11:56:03Z","timestamp":1742644563149,"version":"3.37.3"},"reference-count":105,"publisher":"MDPI AG","issue":"15","license":[{"start":{"date-parts":[[2022,8,1]],"date-time":"2022-08-01T00:00:00Z","timestamp":1659312000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National Key R&D Program of China","award":["2016YFA0401103"]},{"name":"key projects of the National Natural Science Foundation of China","award":["61935014"]},{"name":"Shenzhen Science and Technology Project","award":["JCYJ20200109144012410"]},{"name":"Science and Technology Project of Guangdong Province","award":["2021A0505030013"]},{"name":"Scientific Research Project of General Universities in Guangdong Province","award":["2021KCXTD058"]},{"name":"Graduate School-Enterprise Cooperation Project of Shenzhen Technology University","award":["XQHZ202201"]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"Optical fiber Fabry\u2013Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide variety of optical fiber probe microcantilever sensors based on Fabry\u2013Perot interferometer. The operation principle of the optical fiber probe microcantilever sensor is introduced. The fabrication methods, materials, and sensing applications of an optical fiber probe microcantilever sensor with different structures are discussed in detail. The performances of different kinds of fiber probe microcantilever sensors are compared. We also prospect the possible development direction of optical fiber microcantilever sensors.<\/jats:p>","DOI":"10.3390\/s22155748","type":"journal-article","created":{"date-parts":[[2022,8,2]],"date-time":"2022-08-02T03:49:27Z","timestamp":1659412167000},"page":"5748","source":"Crossref","is-referenced-by-count":9,"title":["Optical Fiber Probe Microcantilever Sensor Based on Fabry\u2013Perot Interferometer"],"prefix":"10.3390","volume":"22","author":[{"given":"Yongzhang","family":"Chen","sequence":"first","affiliation":[{"name":"College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518060, China"},{"name":"Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, Shenzhen Technology University, Shenzhen 518060, China"}]},{"given":"Yiwen","family":"Zheng","sequence":"additional","affiliation":[{"name":"Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, Shenzhen Technology University, Shenzhen 518060, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0845-8601","authenticated-orcid":false,"given":"Haibing","family":"Xiao","sequence":"additional","affiliation":[{"name":"School of Intelligent Manufacturing and Equipment, Shenzhen Institute of Information Technology, Shenzhen 518172, China"}]},{"given":"Dezhi","family":"Liang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, Shenzhen Technology University, Shenzhen 518060, China"}]},{"given":"Yufeng","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, Shenzhen Technology University, Shenzhen 518060, China"}]},{"given":"Yongqin","family":"Yu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, Shenzhen Technology University, Shenzhen 518060, China"}]},{"given":"Chenlin","family":"Du","sequence":"additional","affiliation":[{"name":"Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, Shenzhen Technology University, Shenzhen 518060, China"}]},{"given":"Shuangchen","family":"Ruan","sequence":"additional","affiliation":[{"name":"Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, Shenzhen Technology University, Shenzhen 518060, China"}]}],"member":"1968","published-online":{"date-parts":[[2022,8,1]]},"reference":[{"doi-asserted-by":"crossref","unstructured":"Roriz, P., Silva, S., Frazao, O., and Novais, S. (2020). Optical Fiber Temperature Sensors and Their Biomedical Applications. Sensors, 20.","key":"ref_1","DOI":"10.3390\/s20072113"},{"doi-asserted-by":"crossref","unstructured":"Dai, J.X., Zhu, L., Wang, G.P., Xiang, F., Qin, Y.H., Wang, M., and Yang, M.H. (2017). Optical Fiber Grating Hydrogen Sensors: A Review. Sensors, 17.","key":"ref_2","DOI":"10.3390\/s17030577"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"324","DOI":"10.1016\/j.snb.2016.03.026","article-title":"Review on the graphene based optical fiber chemical and biological sensors","volume":"231","author":"Zhao","year":"2016","journal-title":"Sens. Actuator B Chem."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"17115","DOI":"10.3390\/s150717115","article-title":"Optical Fibre Pressure Sensors in Medical Applications","volume":"15","author":"Poeggel","year":"2015","journal-title":"Sensors"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"703","DOI":"10.1016\/j.ijleo.2018.04.131","article-title":"Review of optical fiber sensors for deformation measurement","volume":"168","author":"Di","year":"2018","journal-title":"Optik"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"161","DOI":"10.1016\/j.measurement.2018.07.068","article-title":"Review of optical fiber bending\/curvature sensor","volume":"130","author":"Wang","year":"2018","journal-title":"Measurement"},{"doi-asserted-by":"crossref","unstructured":"Ding, Z.Y., Wang, C.H., Liu, K., Jiang, J.F., Yang, D., Pan, G.Y., Pu, Z.L., and Liu, T.G. (2018). Distributed Optical Fiber Sensors Based on Optical Frequency Domain Reflectometry: A review. Sensors, 18.","key":"ref_7","DOI":"10.3390\/s18041072"},{"doi-asserted-by":"crossref","unstructured":"Korposh, S., James, S.W., Lee, S.W., and Tatam, R.P. (2019). Tapered Optical Fibre Sensors: Current Trends and Future Perspectives. Sensors, 19.","key":"ref_8","DOI":"10.3390\/s19102294"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"25208","DOI":"10.3390\/s151025208","article-title":"Fiber-Optic Chemical Sensors and Fiber-Optic Bio-Sensors","volume":"15","author":"Pospisilova","year":"2015","journal-title":"Sensors"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"103261","DOI":"10.1016\/j.autcon.2020.103261","article-title":"Structural Health Monitoring with Distributed Optical Fiber Sensors of tunnel lining affected by nearby construction activity","volume":"117","author":"Gomez","year":"2020","journal-title":"Autom. Constr."},{"unstructured":"Chan, H.M., Parker, A.R., Piazza, A., and Richards, W.L. (2015, January 10\u201312). Fiber-Optic Sensing System: Overview, Development and Deployment in Flight at NASA. Proceedings of the IEEE Avionics and Vehicle Fiber-Optics and Photonics Conference, Santa Barbara, CA, USA.","key":"ref_11"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"073003","DOI":"10.1088\/2040-8986\/aac68d","article-title":"Biomedical application of optical fibre sensors","volume":"20","author":"Correia","year":"2018","journal-title":"J. Opt."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"82","DOI":"10.1016\/j.yofte.2017.11.006","article-title":"Multi-interface level in oil tanks and applications of optical fiber sensors","volume":"40","author":"Leal","year":"2018","journal-title":"Opt. Fiber Technol."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"511","DOI":"10.1016\/j.optlaseng.2004.02.008","article-title":"Optical fiber sensors for the electric power industry","volume":"43","author":"Bohnert","year":"2005","journal-title":"Opt. Lasers Eng."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"107082","DOI":"10.1016\/j.optlastec.2021.107082","article-title":"Optical fiber sensing for marine environment and marine structural health monitoring: A review","volume":"140","author":"Min","year":"2021","journal-title":"Opt. Laser Technol."},{"doi-asserted-by":"crossref","unstructured":"Zhou, N., Jia, P.G., Liu, J., Ren, Q.Y., An, G.W., Liang, T., and Xiong, J.J. (2020). MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements. Sensors, 20.","key":"ref_16","DOI":"10.3390\/s20082233"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1408","DOI":"10.1109\/TIM.2010.2085270","article-title":"Modeling of Light Intensity-Modulated Fiber-Optic Displacement Sensors","volume":"60","author":"Polygerinos","year":"2011","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"8","DOI":"10.1016\/j.optlastec.2016.06.006","article-title":"Intensity-modulated abrupt tapered Fiber Mach-Zehnder Interferometer for the simultaneous sensing of temperature and curvature","volume":"86","author":"Raji","year":"2016","journal-title":"Opt. Laser Technol."},{"doi-asserted-by":"crossref","unstructured":"Cao, J.N., Wang, W.X., Zhang, Y.B., and Fu, J.Z. (2004, January 8\u201312). Design of a practical intensity modulated dynamic optical fiber accelerometer. Proceedings of the Conference on Advanced Sensor Systems and Applications II, Beijing, China.","key":"ref_19","DOI":"10.1117\/12.573707"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"81","DOI":"10.1016\/j.optlastec.2018.09.044","article-title":"Multiplexing technique for quasi-distributed sensors arrays in polymer optical fiber intensity variation-based sensors","volume":"111","author":"Leal","year":"2019","journal-title":"Opt. Laser Technol."},{"doi-asserted-by":"crossref","unstructured":"Broadway, C., Kinet, D., Theodosiou, A., Kalli, K., Gusarov, A., Caucheteur, C., and Megret, P. (2019). CYTOP Fibre Bragg Grating Sensors for Harsh Radiation Environments. Sensors, 19.","key":"ref_21","DOI":"10.3390\/s19132853"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"1592","DOI":"10.1109\/JSEN.2006.883850","article-title":"Interrogation of a fiber Bragg grating using a mechanically induced long-period fiber grating","volume":"6","author":"Rego","year":"2006","journal-title":"IEEE Sens. J."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1205","DOI":"10.1007\/s11468-016-0377-0","article-title":"Graphene-MoS2 Hybrid Structure Enhanced Fiber Optic Surface Plasmon Resonance Sensor","volume":"12","author":"Wei","year":"2017","journal-title":"Plasmonics"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"263","DOI":"10.1016\/j.snb.2012.07.039","article-title":"Fiber-optic biosensor based on lossy mode resonances","volume":"174","author":"Socorro","year":"2012","journal-title":"Sens. Actuator B-Chem."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"2467","DOI":"10.3390\/s120302467","article-title":"Interferometric Fiber Optic Sensors","volume":"12","author":"Lee","year":"2012","journal-title":"Sensors"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"89","DOI":"10.1109\/LPT.2019.2957917","article-title":"A High Temperature Sensor Based on Sapphire Fiber Fabry-Perot Interferometer","volume":"32","author":"Wang","year":"2020","journal-title":"IEEE Photonics Technol. Lett"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"1766","DOI":"10.1109\/JSEN.2013.2243834","article-title":"Highly Sensitive Curvature Sensor Using an In-Fiber Mach-Zehnder Interferometer","volume":"13","author":"Wang","year":"2013","journal-title":"IEEE Sens. J."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"794","DOI":"10.1109\/LPT.2015.2514105","article-title":"Temperature Sensor Based on Fiber Ring Laser With Sagnac Loop","volume":"28","author":"Shi","year":"2016","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"067101","DOI":"10.1117\/1.OE.53.6.067101","article-title":"Simultaneous measurement of temperature and pressure with cascaded extrinsic Fabry-Perot interferometer and intrinsic Fabry-Perot interferometer sensors","volume":"53","author":"Zhang","year":"2014","journal-title":"Opt. Eng."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"2261","DOI":"10.1109\/JLT.2019.2901845","article-title":"Temperature-Insensitive Vibration Sensor With Kagome Hollow-Core Fiber Based Fabry-Perot Interferometer","volume":"37","author":"Yu","year":"2019","journal-title":"J. Lightwave Technol."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"339","DOI":"10.1007\/s13320-016-0333-9","article-title":"Fiber Fabry-Perot Interferometer for Curvature Sensing","volume":"6","author":"Monteiro","year":"2016","journal-title":"Photonic Sens."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"0328010","DOI":"10.3788\/AOS201838.0328010","article-title":"Recent Progress of Optical Fiber Fabry-Perot Sensors","volume":"38","author":"Chen","year":"2018","journal-title":"Acta Opt. Sin."},{"doi-asserted-by":"crossref","unstructured":"Ma, Z.B., Cheng, S.L., Kou, W.Y., Chen, H.B., Wang, W., Zhang, X.X., and Guo, T.X. (2019). Sensitivity-Enhanced Extrinsic Fabry-Perot Interferometric Fiber-Optic Microcavity Strain Sensor. Sensors, 19.","key":"ref_33","DOI":"10.3390\/s19194097"},{"doi-asserted-by":"crossref","unstructured":"Wang, R.K., Xie, X.J., Xu, X.G., Chen, X.F., and Xiao, L.F. (2019). Comparison of Measurements with Finite-Element Analysis of Silicon-Diaphragm-Based Fiber-Optic Fabry-Perot Temperature Sensors. Sensors, 19.","key":"ref_34","DOI":"10.3390\/s19214780"},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"134","DOI":"10.1016\/j.abb.2019.02.001","article-title":"Atomic force microscopy for single molecule characterisation of protein aggregation","volume":"664","author":"Ruggeri","year":"2019","journal-title":"Arch. Biochem. Biophys."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"230504","DOI":"10.1103\/PhysRevLett.124.230504","article-title":"Truncated Nonlinear Interferometry for Quantum-Enhanced Atomic Force Microscopy","volume":"124","author":"Pooser","year":"2020","journal-title":"Phys. Rev. Lett."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"14404","DOI":"10.1021\/ja805235k","article-title":"Stress-induced Chemical Detection Using Flexible Metal-Organic Frameworks","volume":"130","author":"Allendorf","year":"2008","journal-title":"J. Am. Chem. Soc."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"393","DOI":"10.1364\/OPTICA.2.000393","article-title":"Ultrasensitive measurement of microcantilever displacement below the shot-noise limit","volume":"2","author":"Pooser","year":"2015","journal-title":"Optica"},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"141","DOI":"10.1016\/j.sna.2015.05.024","article-title":"Precision density and viscosity measurement using two cantilevers with different widths","volume":"232","author":"Cakmak","year":"2015","journal-title":"Sens. Actuator A Phys."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"276","DOI":"10.1016\/j.snb.2018.06.017","article-title":"Fabrication of ZnO nanorods and Chitosan@ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing","volume":"273","author":"Xu","year":"2018","journal-title":"Sens. Actuator B-Chem."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"053501","DOI":"10.1063\/1.2170139","article-title":"Monolithic fiber-top sensor for critical environments and standard applications","volume":"88","author":"Iannuzzi","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"ref_42","first-page":"172","article-title":"The tension of metallic films deposited by elecrtolysis","volume":"82","author":"Stoney","year":"1909","journal-title":"Proc. Roy. Soc. A"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"7221","DOI":"10.1109\/JSEN.2015.2472971","article-title":"A Micro-Machined Optical Fiber Cantilever as a Miniaturized pH Sensor","volume":"15","author":"Li","year":"2015","journal-title":"IEEE Sens. J."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"886","DOI":"10.1088\/0960-1317\/16\/5\/002","article-title":"Carving fiber-top optomechanical transducers from an optical fiber","volume":"16","author":"Deladi","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"106105","DOI":"10.1063\/1.2358710","article-title":"Fiber-top atomic force microscope","volume":"77","author":"Iannuzzi","year":"2006","journal-title":"Rev. Sci. Instrum."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"10","DOI":"10.1111\/j.1365-2818.2010.03476.x","article-title":"Fibre-top atomic force microscope probe with optical near-field detection capabilities","volume":"242","author":"Tiribilli","year":"2011","journal-title":"J. Microsc."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"2308","DOI":"10.1364\/OL.35.002308","article-title":"Microfiber-probe-based ultrasmall interferometric sensor","volume":"35","author":"Kou","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"14053","DOI":"10.1364\/OE.24.014053","article-title":"Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips","volume":"24","author":"Andre","year":"2016","journal-title":"Opt. Express"},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"370","DOI":"10.1111\/jmi.12452","article-title":"Miniaturized fibre-top cantilevers on etched fibres","volume":"264","author":"Cui","year":"2016","journal-title":"J. Microsc."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"706","DOI":"10.1016\/j.snb.2006.03.049","article-title":"A fiber-top cantilever for hydrogen detection","volume":"121","author":"Iannuzzi","year":"2007","journal-title":"Sens. Actuator B-Chem."},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"2120","DOI":"10.1364\/OPEX.12.002120","article-title":"Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching","volume":"12","author":"Bellouard","year":"2004","journal-title":"Opt. Express"},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"275","DOI":"10.1002\/pssr.200802203","article-title":"Femtosecond laser-assisted formation of channels in sapphire using KOH solution","volume":"2","author":"Juodkazis","year":"2008","journal-title":"Phys. Status Solidi-Rapid Res. Lett."},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"3576","DOI":"10.1039\/c2lc40366h","article-title":"Femtosecond laser processing for optofluidic fabrication","volume":"12","author":"Sugioka","year":"2012","journal-title":"Lab Chip"},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"035005","DOI":"10.1088\/0960-1317\/18\/3\/035005","article-title":"Carving fiber-top cantilevers with femtosecond laser micromachining","volume":"18","author":"Said","year":"2008","journal-title":"J. Micromech. Microeng."},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"045021","DOI":"10.1088\/0960-1317\/23\/4\/045021","article-title":"Laser machining of sensing components on the end of optical fibres","volume":"23","author":"Albri","year":"2013","journal-title":"J. Micromech. Microeng."},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"035206","DOI":"10.1088\/0957-0233\/25\/3\/035206","article-title":"Fabricating optical fibre-top cantilevers for temperature sensing","volume":"25","author":"Li","year":"2014","journal-title":"Meas. Sci. Technol."},{"key":"ref_57","doi-asserted-by":"crossref","first-page":"2898","DOI":"10.1364\/OL.36.002898","article-title":"Top-down approach to fiber-top cantilevers","volume":"36","author":"Gavan","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_58","doi-asserted-by":"crossref","first-page":"115005","DOI":"10.1088\/1361-6439\/aa8c4e","article-title":"Optimization of the batch production of silicon fiber-top MEMS devices","volume":"27","author":"Rector","year":"2017","journal-title":"J. Micromech. Microeng."},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"33163","DOI":"10.1021\/acsami.0c06179","article-title":"Fiber-Tip Polymer Microcantilever for Fast and Highly Sensitive Hydrogen Measurement","volume":"12","author":"Xiong","year":"2020","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"ref_60","doi-asserted-by":"crossref","first-page":"035204","DOI":"10.1088\/2040-8978\/12\/3\/035204","article-title":"A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses","volume":"12","author":"Malinauskas","year":"2010","journal-title":"J. Opt."},{"key":"ref_61","doi-asserted-by":"crossref","first-page":"474","DOI":"10.1016\/j.optlastec.2018.05.008","article-title":"Two-photon polymerization based large scaffolds for adhesion and proliferation studies of human primary fibroblasts","volume":"106","author":"Trautmann","year":"2018","journal-title":"Opt. Laser Technol."},{"key":"ref_62","first-page":"56","article-title":"Two-photon laser polymerization: From fundamentals to biomedical application in tissue engineering and regenerative medicine","volume":"10","author":"Raimondi","year":"2012","journal-title":"J. Appl. Biomater. Funct. Mater."},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"7600107","DOI":"10.1109\/JQE.2018.2871315","article-title":"Femtosecond Laser Microfabricated Optofluidic Mach-Zehnder Interferometer for Refractive Index Sensing","volume":"54","author":"Zhang","year":"2018","journal-title":"IEEE J. Quantum Electron."},{"key":"ref_64","first-page":"1","article-title":"Design and realization of 3D printed fiber-tip microcantilever probes applied to hydrogen sensing","volume":"3","author":"Changrui","year":"2022","journal-title":"Light Adv. Manuf."},{"key":"ref_65","doi-asserted-by":"crossref","first-page":"094033","DOI":"10.1088\/0957-0233\/21\/9\/094033","article-title":"Ferrule-top micromachined devices: Design, fabrication, performance","volume":"21","author":"Gruca","year":"2010","journal-title":"Meas. Sci. Technol."},{"doi-asserted-by":"crossref","unstructured":"Cipullo, A., Gruca, G., Heeck, K., De Filippis, F., Iannuzzi, D., and Zeni, L. (2011, January 17). Ferrule-top cantilever optical fiber sensor for velocity measurements of low speed air flows. Proceedings of the 21st International Conference on Optical Fiber Sensors, Ottawa, ON, Canada.","key":"ref_66","DOI":"10.1117\/12.885087"},{"key":"ref_67","doi-asserted-by":"crossref","first-page":"17","DOI":"10.1016\/j.sna.2012.01.044","article-title":"Numerical study of a ferrule-top cantilever optical fiber sensor for wind-tunnel applications and comparison with experimental results","volume":"178","author":"Cipullo","year":"2012","journal-title":"Sens. Actuator A Phys."},{"key":"ref_68","doi-asserted-by":"crossref","first-page":"023027","DOI":"10.1088\/1367-2630\/13\/2\/023027","article-title":"Measurement of the Casimir force with a ferrule-top sensor","volume":"13","author":"Zuurbier","year":"2011","journal-title":"New J. Phys."},{"key":"ref_69","doi-asserted-by":"crossref","first-page":"123702","DOI":"10.1063\/1.3516044","article-title":"Ferrule-top atomic force microscope","volume":"81","author":"Chavan","year":"2010","journal-title":"Rev. Sci. Instrum."},{"key":"ref_70","doi-asserted-by":"crossref","first-page":"046107","DOI":"10.1063\/1.3579496","article-title":"Ferrule-top atomic force microscope. II. Imaging in tapping mode and at low temperature","volume":"82","author":"Chavan","year":"2011","journal-title":"Rev. Sci. Instrum."},{"key":"ref_71","doi-asserted-by":"crossref","first-page":"12048","DOI":"10.2971\/jeos.2012.12048","article-title":"Fiber optic sensors for precursory acoustic signals detection in rockfall events","volume":"7","author":"Schenato","year":"2012","journal-title":"J. Eur. Opt. Soc.-Rapid Publ."},{"doi-asserted-by":"crossref","unstructured":"Chavan, D., Gruca, G., van de Watering, T., Heeck, K., Rector, J., Slaman, M., Andres, D., Tiribilli, B., Margheri, G., and Iannuzzi, D. (2012, January 16\u201318). Fiber-top and ferrule-top cantilevers for atomic force microscopy and scanning near field optical microscopy. Proceedings of the Conference on Optical Micro- and Nanometrology IV, Brussels, Belgium.","key":"ref_72","DOI":"10.1117\/12.922117"},{"key":"ref_73","doi-asserted-by":"crossref","first-page":"1476","DOI":"10.1364\/OL.38.001476","article-title":"Collecting optical coherence elastography depth profiles with a micromachined cantilever probe","volume":"38","author":"Chavan","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_74","doi-asserted-by":"crossref","first-page":"77","DOI":"10.1016\/j.sna.2012.11.011","article-title":"Demonstration of an optically actuated ferrule-top device for pressure and humidity sensing","volume":"190","author":"Gruca","year":"2013","journal-title":"Sens. Actuator A Phys."},{"key":"ref_75","doi-asserted-by":"crossref","first-page":"6680","DOI":"10.1038\/s41598-018-25082-8","article-title":"Opto-mechanical lab-on-fibre seismic sensors detected the Norcia earthquake","volume":"8","author":"Pisco","year":"2018","journal-title":"Sci. Rep."},{"key":"ref_76","doi-asserted-by":"crossref","first-page":"1998","DOI":"10.1109\/JLT.2019.2961766","article-title":"Opto-Mechanical Lab-on-Fiber Accelerometers","volume":"38","author":"Bruno","year":"2020","journal-title":"J. Lightwave Technol."},{"key":"ref_77","doi-asserted-by":"crossref","first-page":"505","DOI":"10.1016\/j.sna.2018.07.014","article-title":"Label-free ferrule-top optical fiber micro-cantilever biosensor","volume":"280","author":"Li","year":"2018","journal-title":"Sens. Actuator A Phys."},{"key":"ref_78","doi-asserted-by":"crossref","first-page":"3417","DOI":"10.1364\/OL.43.003417","article-title":"Fast demodulated white-light interferometry-based fiber-optic Fabry-Perot cantilever microphone","volume":"43","author":"Chen","year":"2018","journal-title":"Opt. Lett."},{"key":"ref_79","doi-asserted-by":"crossref","first-page":"205","DOI":"10.1016\/j.snb.2018.04.123","article-title":"Ultra-high sensitive fiber-optic Fabry-Perot cantilever enhanced resonant photoacoustic spectroscopy","volume":"268","author":"Chen","year":"2018","journal-title":"Sens. Actuator B Chem."},{"key":"ref_80","doi-asserted-by":"crossref","first-page":"5038","DOI":"10.1364\/OL.43.005038","article-title":"Lock-in white-light-interferometry-based all-optical photoacoustic spectrometer","volume":"43","author":"Chen","year":"2018","journal-title":"Opt. Lett."},{"key":"ref_81","doi-asserted-by":"crossref","first-page":"293","DOI":"10.1007\/s13320-019-0545-x","article-title":"Trace Ammonia Detection Based on Near-Infrared Fiber-Optic Cantilever-Enhanced Photoacoustic Spectroscopy","volume":"9","author":"Guo","year":"2019","journal-title":"Photonic Sens."},{"key":"ref_82","doi-asserted-by":"crossref","first-page":"13600","DOI":"10.1364\/OE.424387","article-title":"All-optical high-sensitivity resonant photoacoustic sensor for remote CH4 gas detection","volume":"29","author":"Gong","year":"2021","journal-title":"Opt. Express."},{"key":"ref_83","doi-asserted-by":"crossref","first-page":"15050","DOI":"10.1364\/OE.387195","article-title":"Simultaneous measurement of acoustic pressure and temperature using a Fabry-Perot interferometric fiber-optic cantilever sensor","volume":"28","author":"Chen","year":"2020","journal-title":"Opt. Express"},{"key":"ref_84","doi-asserted-by":"crossref","first-page":"7005808","DOI":"10.1109\/TIM.2021.3102746","article-title":"Highly Sensitive Optical Fiber Photoacoustic Sensor for In Situ Detection of Dissolved Gas in Oil","volume":"70","author":"Chen","year":"2021","journal-title":"IEEE Trans. Instrum. Meas."},{"doi-asserted-by":"crossref","unstructured":"Xin, F.X., Yang, D.W., Li, C., Yan, W., and Wang, Y. (2020, January 20\u201322). Detection of CO2 concentration using a fiber-optic cantilever acoustic sensor in 2. 0-\u03bcm band. In proceedings of the International Conference on Optoelectronic and Microelectronic Technology and Application, Nanjing, China.","key":"ref_85","DOI":"10.1117\/12.2585255"},{"doi-asserted-by":"crossref","unstructured":"Lauwers, T., Gliere, A., and Basrour, S. (2020). An all-Optical Photoacoustic Sensor for the Detection of Trace Gas. Sensors, 20.","key":"ref_86","DOI":"10.3390\/s20143967"},{"key":"ref_87","doi-asserted-by":"crossref","first-page":"20086","DOI":"10.1109\/JSEN.2021.3098592","article-title":"A Miniature Fiber-Optic Silicon Cantilever-Based Acoustic Sensor Using Ultra-High Speed Spectrum Demodulation","volume":"21","author":"Gong","year":"2021","journal-title":"IEEE Sens. J."},{"key":"ref_88","doi-asserted-by":"crossref","first-page":"9511908","DOI":"10.1109\/TIM.2021.3101573","article-title":"Ultrahigh Sensitivity Fiber-Optic Fabry-Perot Interferometric Acoustic Sensor Based on Silicon Cantilever","volume":"70","author":"Guo","year":"2021","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_89","doi-asserted-by":"crossref","first-page":"1151","DOI":"10.1021\/acs.analchem.1c04309","article-title":"High-Sensitivity Silicon Cantilever-Enhanced Photoacoustic Spectroscopy Analyzer with Low Gas Consumption","volume":"94","author":"Guo","year":"2022","journal-title":"Anal. Chem"},{"key":"ref_90","doi-asserted-by":"crossref","first-page":"105005","DOI":"10.1088\/0960-1317\/23\/10\/105005","article-title":"Fabrication of a side aligned optical fibre interferometer by focused ion beam machining","volume":"23","author":"Sun","year":"2013","journal-title":"J. Micromech. Microeng."},{"key":"ref_91","doi-asserted-by":"crossref","first-page":"1836","DOI":"10.1109\/LPT.2017.2753279","article-title":"Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement","volume":"29","author":"Li","year":"2017","journal-title":"IEEE Photonics Technol. Lett."},{"doi-asserted-by":"crossref","unstructured":"Liu, J., Yuan, L., Huang, J., and Xiao, H. (2016, January 15\u201318). A cantilever based optical fiber acoustic sensor fabricated by femtosecond laser micromachining. Proceedings of the Conference on Laser 3D Manufacturing III, San Francisco, CA, USA.","key":"ref_92","DOI":"10.1117\/12.2213614"},{"key":"ref_93","doi-asserted-by":"crossref","first-page":"2459","DOI":"10.1364\/OL.42.002459","article-title":"Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser","volume":"42","author":"Liu","year":"2017","journal-title":"Opt. Lett."},{"key":"ref_94","doi-asserted-by":"crossref","first-page":"207","DOI":"10.1016\/j.optlaseng.2018.06.003","article-title":"Fiber-optic micro vibration sensors fabricated by a femtosecond laser","volume":"110","author":"Zhang","year":"2018","journal-title":"Opt. Lasers Eng."},{"key":"ref_95","doi-asserted-by":"crossref","first-page":"807107","DOI":"10.1117\/1.OE.57.8.087107","article-title":"Micro all-glass fiber-optic accelerometers","volume":"57","author":"Zhang","year":"2018","journal-title":"Opt. Eng."},{"key":"ref_96","doi-asserted-by":"crossref","first-page":"293","DOI":"10.1515\/ntrev-2019-0028","article-title":"Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam","volume":"8","author":"Ma","year":"2019","journal-title":"Nanotechnol. Rev."},{"key":"ref_97","doi-asserted-by":"crossref","first-page":"035001","DOI":"10.1088\/1367-2630\/16\/3\/035001","article-title":"Multidimensional optomechanical cantilevers for high-frequency force sensing","volume":"16","author":"Doolin","year":"2014","journal-title":"New J. Phys."},{"key":"ref_98","doi-asserted-by":"crossref","first-page":"420","DOI":"10.1021\/nl203736u","article-title":"Discrimination of Escherichia coli Strains using Glycan Cantilever Array Sensors","volume":"12","author":"Mader","year":"2012","journal-title":"Nano Lett."},{"key":"ref_99","doi-asserted-by":"crossref","first-page":"1750079","DOI":"10.1142\/S1793292017500795","article-title":"Nanomechanical Cantilever-Based Sensor: An Efficient Tool to Measure the Binding Between the Herbicide Mesotrione and 4-Hydroxyphenylpyruvate Dioxygenase","volume":"12","author":"Rodrigues","year":"2017","journal-title":"Nano"},{"key":"ref_100","doi-asserted-by":"crossref","first-page":"91","DOI":"10.1016\/j.yofte.2017.01.010","article-title":"Characteristic study on volatile organic compounds optical fiber sensor with zeolite thin film-coated spherical end","volume":"34","author":"Wu","year":"2017","journal-title":"Opt. Fiber Technol."},{"key":"ref_101","doi-asserted-by":"crossref","first-page":"122","DOI":"10.1016\/j.mseb.2014.03.018","article-title":"Nanocrystalline samarium oxide coated fiber optic gas sensor","volume":"186","author":"Renganathan","year":"2014","journal-title":"Mater. Sci. Eng. B Adv. Funct. Solid-State Mater."},{"key":"ref_102","doi-asserted-by":"crossref","first-page":"2035","DOI":"10.1109\/LPT.2017.2761981","article-title":"Graphene-Based Ammonia-Gas Sensor Using In-Fiber Mach-Zehnder Interferometer","volume":"29","author":"Hao","year":"2017","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_103","doi-asserted-by":"crossref","first-page":"78","DOI":"10.1016\/j.optlaseng.2017.04.003","article-title":"Sensing characteristics of nanocrystalline bismuth oxide clad-modified fiber optic gas sensor","volume":"95","author":"Manjula","year":"2017","journal-title":"Opt. Lasers Eng."},{"key":"ref_104","doi-asserted-by":"crossref","first-page":"564","DOI":"10.1016\/j.snb.2015.07.006","article-title":"Methane sensing at room temperature using photothermal cantilever deflection spectroscopy","volume":"221","author":"Rahimi","year":"2015","journal-title":"Sens. Actuator B Chem."},{"key":"ref_105","doi-asserted-by":"crossref","first-page":"18167","DOI":"10.3390\/s150818167","article-title":"A Micro-Preconcentrator Combined Olfactory Sensing System with a Micromechanical Cantilever Sensor for Detecting 2,4-Dinitrotoluene Gas Vapor","volume":"15","author":"Chae","year":"2015","journal-title":"Sensors"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/15\/5748\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,1,20]],"date-time":"2025-01-20T17:08:09Z","timestamp":1737392889000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/22\/15\/5748"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,8,1]]},"references-count":105,"journal-issue":{"issue":"15","published-online":{"date-parts":[[2022,8]]}},"alternative-id":["s22155748"],"URL":"https:\/\/doi.org\/10.3390\/s22155748","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2022,8,1]]}}}