{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,2,21]],"date-time":"2025-02-21T14:50:27Z","timestamp":1740149427873,"version":"3.37.3"},"reference-count":33,"publisher":"MDPI AG","issue":"23","license":[{"start":{"date-parts":[[2020,11,27]],"date-time":"2020-11-27T00:00:00Z","timestamp":1606435200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate\/Au\/photoresist. The ellipsometric characterization of the structure layers, the simulated reflectance spectra, and optical field distributions under GMR conditions showed that multiple waveguide modes can be excited in the PWS. These modes can be used for refractive index sensing, and the theoretical analysis of the designed PWS showed a sensitivity to the refractive index up to 6600 nm per refractive index unit (RIU) and a figure of merit (FOM) up to 224 RIU\u22121. In response to these promising theoretical results, the PWS was used to measure the relative humidity (RH) of moist air with a sensitivity up to 0.141 nm\/%RH and a FOM reaching 3.7 \u00d7 10\u22123%RH\u22121. The results demonstrate that this highly-sensitive and hysteresis-free sensor based on GMR has the potential to be used in a wide range of applications.<\/jats:p>","DOI":"10.3390\/s20236788","type":"journal-article","created":{"date-parts":[[2020,11,27]],"date-time":"2020-11-27T14:16:49Z","timestamp":1606486609000},"page":"6788","source":"Crossref","is-referenced-by-count":9,"title":["Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure"],"prefix":"10.3390","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-8652-9404","authenticated-orcid":false,"given":"Petra","family":"Urbancova","sequence":"first","affiliation":[{"name":"Department of Physics, Faculty of Electrical Engineering and Information Technology, University of Zilina, Univerzitna 1, 01026 Zilina, Slovakia"}]},{"given":"Jakub","family":"Chylek","sequence":"additional","affiliation":[{"name":"Department of Physics, Technical University Ostrava, 17. listopadu 2172\/15, 708 00 Ostrava-Poruba, Czech Republic"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1707-4917","authenticated-orcid":false,"given":"Petr","family":"Hlubina","sequence":"additional","affiliation":[{"name":"Department of Physics, Technical University Ostrava, 17. listopadu 2172\/15, 708 00 Ostrava-Poruba, Czech Republic"}]},{"given":"Dusan","family":"Pudis","sequence":"additional","affiliation":[{"name":"Department of Physics, Faculty of Electrical Engineering and Information Technology, University of Zilina, Univerzitna 1, 01026 Zilina, Slovakia"}]}],"member":"1968","published-online":{"date-parts":[[2020,11,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Xi, P. 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