{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,8,11]],"date-time":"2024-08-11T19:11:41Z","timestamp":1723403501111},"reference-count":22,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2016,8,24]],"date-time":"2016-08-24T00:00:00Z","timestamp":1471996800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"The K-band microelectromechanical systems (MEMS) tunable band-pass filter, with a wide-frequency tunable range and miniature size, is able to fulfill the requirements of the multiband satellite communication systems. A novel 21.69\u201324.36 GHz MEMS tunable band-pass filter is designed, analyzed, fabricated and measured. This paper also designs and analyzes an inductively tuned slow-wave resonator, which consists of the MEMS capacitive switch, the MEMS capacitor and the short metal line. The proposed filter has four different work states by changing the capacitance values of the MEMS switches. Measured results demonstrate that, for all four states, the insertion loss is 2.81, 3.27, 3.65 and 4.03 dB at 24.36, 23.2, 22.24 and 21.69 GHz, respectively. The actuation voltage is 0, 20, 16 and 26 V, respectively. The 3 dB bandwidth of the tunable filter is 5.4%, 6.2%, 5.7% and 5.9%, respectively. This study contributes to the design of miniature millimeter tunable filters with a wide-frequency tunable range.<\/jats:p>","DOI":"10.3390\/mi7090149","type":"journal-article","created":{"date-parts":[[2016,8,24]],"date-time":"2016-08-24T13:59:47Z","timestamp":1472047187000},"page":"149","source":"Crossref","is-referenced-by-count":5,"title":["21.69\u201324.36 GHz MEMS Tunable Band-Pass Filter"],"prefix":"10.3390","volume":"7","author":[{"given":"Zhongliang","family":"Deng","sequence":"first","affiliation":[{"name":"School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China"}]},{"given":"Hao","family":"Wei","sequence":"additional","affiliation":[{"name":"School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China"}]},{"given":"Xubing","family":"Guo","sequence":"additional","affiliation":[{"name":"School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China"}]}],"member":"1968","published-online":{"date-parts":[[2016,8,24]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"3632","DOI":"10.1109\/TMTT.2015.2483495","article-title":"K-band frequency tunable substrate-integrated-waveguide resonator filter with enhanced stopband attenuation","volume":"63","author":"Lee","year":"2015","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1663","DOI":"10.1109\/TMTT.2014.2332298","article-title":"Reconfigurable waveguide filter with variable bandwidth and center frequency","volume":"62","author":"Arnold","year":"2014","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"4002","DOI":"10.1109\/TMTT.2012.2224367","article-title":"A Ka-band fully tunable cavity filter","volume":"60","author":"Yassini","year":"2012","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_4","unstructured":"Pelliccia, L., Cacciamani, F., Sorrentino, R., Farinelli, P., Ligander, P., and Persson, O. (November, January 29). High-Q MEMS-tunable waveguide filters in K-band. Proceedings of the 42nd European Microwave Conference (EuMC), Amsterdam, The Netherlands."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Rohrdantz, B., Schmidt, V., and Jacob, A.F. (2014, January 16\u201318). Microstrip ring resonator based frequency reconfigurable band-pass filters at K-band. Proceedings of the 20th International Conference on Microwaves, Radar, and Wireless Communication (MIKON), Gdansk, Poland.","DOI":"10.1109\/MIKON.2014.6899907"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"78","DOI":"10.1109\/75.658647","article-title":"A K-band tunable microstrip bandpass filter using a thin-film conductor\/ferroelectric\/dielectric multilayer configuration","volume":"8","author":"Subramanyam","year":"1998","journal-title":"IEEE Microw. Guided Wave Lett."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"706","DOI":"10.1088\/0960-1317\/11\/6\/313","article-title":"Tunable millimeter-wave filters using a coplanar waveguide and micromachined variable capacitors","volume":"11","author":"Park","year":"2001","journal-title":"J. Micromech. Microeng."},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Abbaspour-Tamijani, A., Dussopt, L., and Rebeiz, G.M. (2002, January 23\u201326). A millimeter-wave tunable filter using MEMS varactors. Proceedings of the 32nd European Microwave Conference, Milan, Italy.","DOI":"10.1109\/EUMA.2002.339409"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1878","DOI":"10.1109\/TMTT.2003.814317","article-title":"Miniature and tunable filters using MEMS capacitors","volume":"51","author":"Dussopt","year":"2003","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_10","unstructured":"Kim, J.M., Lee, S., Park, J.H., Kim, J.M., Baek, C.W., Kwon, Y., and Kim, Y.K. (2005, January 5\u20139). Low loss K-band tunable bandpass filter using micromachined variable capacitors. Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS \u201905), Seoul, Korea."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Rebeiz, G.M. (2003). RF MEMS: Theory, Design, and Technology, Wiley.","DOI":"10.1002\/0471225282"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2566","DOI":"10.1109\/TMTT.2005.852761","article-title":"A 12-18-GHz Three-Pole RF MEMS Tunable Filter","volume":"53","author":"Entesari","year":"2005","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Kaynak, M., Wietstruck, M., Zhang, W., Drews, J., Barth, R., Knoll, D., Kornd\u00f6rfer, F., Scholz, R., Schulz, K., and Wipf, C. (2012, January 17\u201322). Packaged BiCMOS embedded RF-MEMS switches with integrated inductive loads. Proceedings of the IEEE MTT-S International Microwave Symposium Digest (MTT), Montreal, QC, Canada.","DOI":"10.1109\/MWSYM.2012.6259417"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"2141","DOI":"10.1007\/s00542-015-2604-6","article-title":"Design and analysis a novel RF MEMS switched capacitor for low pull-in voltage application","volume":"22","author":"Deng","year":"2016","journal-title":"Microsyst. Technol."},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Simons, R.N. (2004). Coplanar Waveguide Circuits, Components, and Systems, John Wiley & Sons.","DOI":"10.1002\/0471654507.eme061"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1103","DOI":"10.1109\/TMTT.2005.843501","article-title":"A differential 4-bit 6.5-10-GHz RF MEMS tunable filter","volume":"53","author":"Entesari","year":"2005","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_17","unstructured":"Getsinger, W.J. (June, January 31). Circuit Duals on Planar Transmission Media. Proceedings of the IEEE MTT-S International Microwave Symposium Digest, Boston, MA, USA."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1534","DOI":"10.1109\/22.245673","article-title":"Open and short circuits in coplanar MMIC\u2019s","volume":"41","author":"Beilenhoff","year":"1993","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"734","DOI":"10.1049\/el:19830500","article-title":"Parameters of coplanar waveguides with lower ground plane","volume":"19","author":"Ghione","year":"1983","journal-title":"Electron. Lett."},{"key":"ref_20","unstructured":"Pozar, D.M. (2009). Microwave Engineering, John Wiley & Sons."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1045","DOI":"10.1109\/22.904743","article-title":"High-isolation CPW MEMS shunt switches. 1. Modeling","volume":"48","author":"Muldavin","year":"2000","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"1229","DOI":"10.1109\/JMEMS.2012.2203101","article-title":"RF MEMS shunt capacitive switches using AlN compared to dielectric","volume":"21","author":"Badia","year":"2012","journal-title":"J. Microelectromech. Syst."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/9\/149\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,6,5]],"date-time":"2024-06-05T16:35:23Z","timestamp":1717605323000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/9\/149"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,8,24]]},"references-count":22,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2016,9]]}},"alternative-id":["mi7090149"],"URL":"https:\/\/doi.org\/10.3390\/mi7090149","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016,8,24]]}}}