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{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,8,8]],"date-time":"2024-08-08T00:07:36Z","timestamp":1723075656816},"reference-count":24,"publisher":"Wiley","issue":"1","license":[{"start":{"date-parts":[[2021,7,13]],"date-time":"2021-07-13T00:00:00Z","timestamp":1626134400000},"content-version":"vor","delay-in-days":193,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":["onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Wireless Communications and Mobile Computing"],"published-print":{"date-parts":[[2021,1]]},"abstract":"In this paper, RF MEMS switch with capacitive contact is designed and analyzed for Ka band application. A fixed\u2010fixed beam\/meander configuration has been used to design the switch for frequency band 10\u2009GHz to 40\u2009GHz. Electromagnetic and electromechanical analysis of three\u2010dimensional (3D) structure\/design has been analyzed in multiple finite element method (FEM) based full\u2010wave simulator (Coventorware and high\u2010frequency structure simulator). A comparative study has also been carried out in this work. The high resistivity silicon substrate (tan\u03b4<\/jats:italic> = 0.010, \u03c1<\/jats:italic> > 8\u2009k\u03a9<\/jats:italic> \u2212 cm, \u03b5<\/jats:italic>r<\/jats:italic><\/jats:sub> = 11.8) with a thickness of 675 \u00b1 25\u2009\u03bc<\/jats:italic>m has been taken for switch realization. The designed structure shows an actuation voltage of around 9.2\u2009V. Impedance matching for the switch structure is well below 20\u2009dB, loss in upstate, i.e., insertion loss >0.5\u2009dB, and isolation of >25\u2009dB throughout the frequency band is observed for the aforesaid structure. Furthermore, to increase the RF parameters, AIN dielectric material has been used instead of SiO2<\/jats:sub> resulting in capacitance in downstate that increases hence improved the isolation. The proposed switch can be utilized in various potential applications such as any switching\/tunable networks phased\u2010array radar, reconfigurable antenna, RF phase shifter, mixer, biomedical, filter, and any transmitter\/receiver (T\/R) modules.<\/jats:p>","DOI":"10.1155\/2021\/2021513","type":"journal-article","created":{"date-parts":[[2021,7,13]],"date-time":"2021-07-13T19:50:07Z","timestamp":1626205807000},"update-policy":"http:\/\/dx.doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":24,"title":["Design and Simulation of Capacitive MEMS Switch for Ka Band Application"],"prefix":"10.1155","volume":"2021","author":[{"ORCID":"http:\/\/orcid.org\/0000-0002-0980-0843","authenticated-orcid":false,"given":"Vinay","family":"Bhatia","sequence":"first","affiliation":[]},{"ORCID":"http:\/\/orcid.org\/0000-0002-1340-9206","authenticated-orcid":false,"given":"Sukhdeep","family":"Kaur","sequence":"additional","affiliation":[]},{"ORCID":"http:\/\/orcid.org\/0000-0001-5725-144X","authenticated-orcid":false,"given":"Kuldeep","family":"Sharma","sequence":"additional","affiliation":[]},{"ORCID":"http:\/\/orcid.org\/0000-0002-1965-0703","authenticated-orcid":false,"given":"Punam","family":"Rattan","sequence":"additional","affiliation":[]},{"ORCID":"http:\/\/orcid.org\/0000-0001-9713-3499","authenticated-orcid":false,"given":"Vishal","family":"Jagota","sequence":"additional","affiliation":[]},{"ORCID":"http:\/\/orcid.org\/0000-0003-0937-2583","authenticated-orcid":false,"given":"Mohammed Abdella","family":"Kemal","sequence":"additional","affiliation":[]}],"member":"311","published-online":{"date-parts":[[2021,7,13]]},"reference":[{"key":"e_1_2_9_1_2","doi-asserted-by":"publisher","DOI":"10.1002\/0471225282"},{"key":"e_1_2_9_2_2","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-014-2276-7"},{"key":"e_1_2_9_3_2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2008.924259"},{"key":"e_1_2_9_4_2","doi-asserted-by":"crossref","unstructured":"GoldsmithC. EhmkeJ. MalczewskiA. PillansB. EshelmanS. YaoZ. BrankJ. andEberlyM. Lifetime characterization of capacitive Rf MEMS switches 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157) May 2001 Phoenix AZ USA 227\u2013230 https:\/\/doi.org\/10.1109\/MWSYM.2001.966876.","DOI":"10.1109\/MWSYM.2001.966876"},{"key":"e_1_2_9_5_2","doi-asserted-by":"publisher","DOI":"10.6180\/jase.2005.8.3.03"},{"key":"e_1_2_9_6_2","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-017-3577-4"},{"key":"e_1_2_9_7_2","doi-asserted-by":"publisher","DOI":"10.3390\/s90604455"},{"key":"e_1_2_9_8_2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2011.2107884"},{"key":"e_1_2_9_9_2","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2005.844846"},{"key":"e_1_2_9_10_2","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-018-3989-9"},{"key":"e_1_2_9_11_2","doi-asserted-by":"crossref","unstructured":"PillansB. KleberJ. GoldsmithC. andEberlyM. 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Life time characterization of capacitive power RF MEMS switch 2005 European Microwave Conference October 2005 Paris France https:\/\/doi.org\/10.1109\/eumc.2005.1610224 2-s2.0-33847102787.","DOI":"10.1109\/EUMC.2005.1610224"},{"key":"e_1_2_9_19_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(00)00549-5"},{"key":"e_1_2_9_20_2","doi-asserted-by":"publisher","DOI":"10.1109\/75.704410"},{"key":"e_1_2_9_21_2","doi-asserted-by":"publisher","DOI":"10.1109\/TMTT.2009.2038446"},{"key":"e_1_2_9_22_2","doi-asserted-by":"publisher","DOI":"10.1155\/2021\/5174455"},{"key":"e_1_2_9_23_2","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-015-2604-6"},{"key":"e_1_2_9_24_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(03)00372-8"}],"container-title":["Wireless Communications and Mobile Computing"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/downloads.hindawi.com\/journals\/wcmc\/2021\/2021513.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/downloads.hindawi.com\/journals\/wcmc\/2021\/2021513.xml","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1155\/2021\/2021513","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,7]],"date-time":"2024-08-07T13:32:49Z","timestamp":1723037569000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1155\/2021\/2021513"}},"subtitle":[],"editor":[{"given":"Vimal","family":"Shanmuganathan","sequence":"additional","affiliation":[]}],"short-title":[],"issued":{"date-parts":[[2021,1]]},"references-count":24,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2021,1]]}},"alternative-id":["10.1155\/2021\/2021513"],"URL":"https:\/\/doi.org\/10.1155\/2021\/2021513","archive":["Portico"],"relation":{},"ISSN":["1530-8669","1530-8677"],"issn-type":[{"type":"print","value":"1530-8669"},{"type":"electronic","value":"1530-8677"}],"subject":[],"published":{"date-parts":[[2021,1]]},"assertion":[{"value":"2021-05-13","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2021-06-29","order":2,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"2021-07-13","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}]}}