{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,29]],"date-time":"2024-10-29T10:05:43Z","timestamp":1730196343704,"version":"3.28.0"},"reference-count":7,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010,3]]},"DOI":"10.1109\/amc.2010.5464091","type":"proceedings-article","created":{"date-parts":[[2010,5,26]],"date-time":"2010-05-26T16:53:56Z","timestamp":1274892836000},"page":"426-429","source":"Crossref","is-referenced-by-count":0,"title":["Study on self-sensing electrostatic suspension using a variable capacitor"],"prefix":"10.1109","author":[{"given":"T.","family":"Kato","sequence":"first","affiliation":[]},{"given":"Y.","family":"Ishino","sequence":"additional","affiliation":[]},{"given":"M.","family":"Takasaki","sequence":"additional","affiliation":[]},{"given":"T.","family":"Mizuno","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"ref4","DOI":"10.1109\/41.735338"},{"key":"ref3","first-page":"342","article-title":"Noncontact Electrostatic Levitation of 400mm Silicon Wafer","volume":"71","author":"yamashita","year":"2005","journal-title":"Journal of the Japan Society of Precision Engineering"},{"key":"ref6","first-page":"202","article-title":"Electrostatic Suspension in 3-DOF by Using Variable Capacitor","author":"kato","year":"2008","journal-title":"Proc 11th International Symposium on Magnetic Bearings 2008 Nara 235"},{"key":"ref5","article-title":"Proposal of an Electrostatic Actuator Control System Using a Variable Capacitor Mechanism","author":"tsukada","year":"2006","journal-title":"Proc 8th International Conference on Motion and Vibration Control"},{"key":"ref7","first-page":"1278","article-title":"Self-Sensing Electrostatic Suspension Using a Hysteresis Amplifier","author":"mizuno","year":"2000","journal-title":"Proc International Power Electronics Conference IPEC-Tokyo 2000"},{"doi-asserted-by":"publisher","key":"ref2","DOI":"10.1109\/41.466330"},{"key":"ref1","first-page":"343","article-title":"Electrostatic Silicon Wafer Suspension","author":"jin","year":"1994","journal-title":"Proc 4th International Symposium on Magnetic Bearings"}],"event":{"name":"2010 11th IEEE International Workshop on Advanced Motion Control (AMC)","start":{"date-parts":[[2010,3,21]]},"location":"Nagaoka, Japan","end":{"date-parts":[[2010,3,24]]}},"container-title":["2010 11th IEEE International Workshop on Advanced Motion Control (AMC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/5459481\/5463987\/05464091.pdf?arnumber=5464091","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,19]],"date-time":"2017-03-19T02:44:38Z","timestamp":1489891478000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/5464091\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010,3]]},"references-count":7,"URL":"https:\/\/doi.org\/10.1109\/amc.2010.5464091","relation":{},"subject":[],"published":{"date-parts":[[2010,3]]}}}