{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,8,6]],"date-time":"2024-08-06T02:00:32Z","timestamp":1722909632222},"reference-count":15,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"DOI":"10.1109\/acc.2003.1239773","type":"proceedings-article","created":{"date-parts":[[2004,6,22]],"date-time":"2004-06-22T16:27:43Z","timestamp":1087921663000},"page":"1320-1327","source":"Crossref","is-referenced-by-count":1,"title":["A method for real-time control of thin film composition using OES and XPS"],"prefix":"10.1109","volume":"2","author":[{"family":"Dong Ni","sequence":"first","affiliation":[]},{"family":"Yiming Lou","sequence":"additional","affiliation":[]},{"given":"P.D.","family":"Christofides","sequence":"additional","affiliation":[]},{"family":"Lin Sha","sequence":"additional","affiliation":[]},{"given":"S.","family":"Lao","sequence":"additional","affiliation":[]},{"given":"J.P.","family":"Chang","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"doi-asserted-by":"publisher","key":"15","DOI":"10.1002\/(SICI)1521-3862(199803)04:02<69::AID-CVDE69>3.3.CO;2-7"},{"doi-asserted-by":"publisher","key":"13","DOI":"10.1007\/978-94-009-5758-9"},{"doi-asserted-by":"publisher","key":"14","DOI":"10.1007\/978-1-4757-6610-3"},{"doi-asserted-by":"publisher","key":"11","DOI":"10.1016\/S0257-8972(96)03045-9"},{"year":"1992","author":"moulder","journal-title":"Handbook of X-Ray Photoelectron Spectroscopy A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data","key":"12"},{"doi-asserted-by":"publisher","key":"3","DOI":"10.1016\/S0927-796X(97)00023-5"},{"doi-asserted-by":"publisher","key":"2","DOI":"10.1016\/S0009-2509(98)00458-8"},{"doi-asserted-by":"publisher","key":"1","DOI":"10.1016\/S0009-2509(00)00372-9"},{"doi-asserted-by":"publisher","key":"10","DOI":"10.1109\/55.568766"},{"year":"1991","author":"coughanowr","journal-title":"Process Systems Analysis and Control","key":"7"},{"doi-asserted-by":"publisher","key":"6","DOI":"10.1063\/1.125779"},{"doi-asserted-by":"publisher","key":"5","DOI":"10.1063\/1.1506421"},{"doi-asserted-by":"publisher","key":"4","DOI":"10.1116\/1.1403717"},{"doi-asserted-by":"publisher","key":"9","DOI":"10.1109\/IEDM.1998.746307"},{"doi-asserted-by":"publisher","key":"8","DOI":"10.1016\/0921-5093(91)90648-7"}],"event":{"acronym":"ACC-03","name":"2003 American Control Conference, 2003.","location":"Denver, Colorado, USA"},"container-title":["Proceedings of the 2003 American Control Conference, 2003."],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx5\/8775\/27786\/01239773.pdf?arnumber=1239773","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,3,13]],"date-time":"2017-03-13T21:08:59Z","timestamp":1489439339000},"score":1,"resource":{"primary":{"URL":"http:\/\/ieeexplore.ieee.org\/document\/1239773\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[null]]},"references-count":15,"URL":"https:\/\/doi.org\/10.1109\/acc.2003.1239773","relation":{},"subject":[]}}