SCREEN Semiconductor Solutions Co., Ltd. (SCREEN SPE) has finalized the development of the SS-3200 cleaning system for 200mm wafers. Particularly, this new model for 200mm wafers, in its single wafer cleaning systems lineup, uses the scrubber method¹ (spin scrubbers). Due to these systems’ outstanding cleaning performance, stability, and reliability, SCREEN SPE boasts the top global market share in the spin scrubber category². Sales of the new system will begin in December 2024.

In addition to applications for general devices employing 200mm wafers, the SS-3200 for 200mm will help optimize the cleaning process for power devices, which are driving the 200mm market.

Rise in Demand for Power Devices, Clean Energy  

Recently, demand for next-generation power devices has increased rapidly. This is particularly true for use in automotive devices for electric and self-driving vehicles and power control systems. At the same time, semiconductor production equipment manufacturers are now charged with reducing environmental impact. Among them include reducing energy consumption in device manufacturing processes.

Against this backdrop, SCREEN SPE has developed the SS-3200 for 200mm, a spin scrubber for 200mm wafers. Primarily, the new system maintains many of the popular features of the SS-3200, the de facto standard for spin scrubbers. This includes its wafer cleaning technology, chamber design, transfer system, and platform, in a form optimized for 200mm wafers. It also features throughput of up to 500 wafers per hour. Particularly, this is among the highest in the industry for 200mm spin scrubbers and more than three times the company’s previous model³. The SS-3200 for 200mm also helps reduce environmental impact, using less de-ionized (DI) water per wafer.

Furthermore, slide-out spin chambers and convenient access to the transfer area make maintenance easy. Like the previous model, it can also be equipped with an optional hot plate. Thus, it is ideal for drying MEMS and other three-dimensional structures.

With the launch of the SS-3200 for 200mm, SCREEN SPE seeks to facilitate the mass production of increasingly sophisticated and diverse next-generation power devices while taking another step toward manufacturing processes that better protect the environment. By staying ahead of the curve in identifying industry needs, the company will continue to contribute to the evolution of semiconductor devices.

-20 November 2024-